Fabrication of two-dimensional micro patterns for adaptive optics by using laser interference lithography

2015 ◽  
Author(s):  
Xinghui Li ◽  
Yindi Cai ◽  
Ryo Aihara ◽  
Yuki Shimizu ◽  
So Ito ◽  
...  
Keyword(s):  
Adaptive Optics ◽  
Interference Lithography ◽  
Laser Interference Lithography ◽  
Two Dimensional ◽  
Laser Interference ◽  
Micro Patterns

Large-area two-dimensional silicon photonic crystals for infrared light fabricated with laser interference lithography

2004 ◽  
Vol 15 (5) ◽  
pp. 639-642 ◽  
Author(s):  
L Prodan ◽  
T G Euser ◽  
H A G M van Wolferen ◽  
C Bostan ◽  
R M de Ridder ◽  
...  
Keyword(s):  
Photonic Crystals ◽  
Infrared Light ◽  
Interference Lithography ◽  
Laser Interference Lithography ◽  
Two Dimensional ◽  
Laser Interference ◽  
Large Area ◽  
Silicon Photonic

Fabricating Three-Dimensional Periodic Micro Patterns on Photo-Resists Using Laser Interference Lithography

2017 ◽  
Vol 19 (5) ◽  
pp. 1600855 ◽  
Author(s):  
Florian Rößler ◽  
Valentin Lang ◽  
Denise Günther ◽  
Andrés Fabián Lasagni
Keyword(s):  
Three Dimensional ◽  
Interference Lithography ◽  
Laser Interference Lithography ◽  
Laser Interference ◽  
Micro Patterns
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