2510 Laser interference lithography with a modified two-axis Lloyd's mirror interferometer for fabrication of two-dimensional micro patterns

2015 ◽  
Vol 2015.8 (0) ◽  
pp. _2510-1_-_2510-4_ ◽  
Author(s):  
Yindi Cai ◽  
Xinghui LI ◽  
Ryo AIHARA ◽  
Yuki SHIMIZU ◽  
So ITO ◽  
...  
Keyword(s):  
Interference Lithography ◽  
Laser Interference Lithography ◽  
Two Dimensional ◽  
Laser Interference ◽  
Micro Patterns

Large-area two-dimensional silicon photonic crystals for infrared light fabricated with laser interference lithography

2004 ◽  
Vol 15 (5) ◽  
pp. 639-642 ◽  
Author(s):  
L Prodan ◽  
T G Euser ◽  
H A G M van Wolferen ◽  
C Bostan ◽  
R M de Ridder ◽  
...  
Keyword(s):  
Photonic Crystals ◽  
Infrared Light ◽  
Interference Lithography ◽  
Laser Interference Lithography ◽  
Two Dimensional ◽  
Laser Interference ◽  
Large Area ◽  
Silicon Photonic

Fabricating Three-Dimensional Periodic Micro Patterns on Photo-Resists Using Laser Interference Lithography

2017 ◽  
Vol 19 (5) ◽  
pp. 1600855 ◽  
Author(s):  
Florian Rößler ◽  
Valentin Lang ◽  
Denise Günther ◽  
Andrés Fabián Lasagni
Keyword(s):  
Three Dimensional ◽  
Interference Lithography ◽  
Laser Interference Lithography ◽  
Laser Interference ◽  
Micro Patterns
Sign in / Sign up

Export Citation Format

Share Document