A novel methodology for litho-to-etch pattern fidelity correction for SADP process

2017 ◽  
Author(s):  
Shr-Jia Chen ◽  
Yu-Cheng Chang ◽  
Arthur Lin ◽  
Yi-Shiang Chang ◽  
Chia-Chi Lin ◽  
...  
Keyword(s):  
1961 ◽  
Vol 16 (9) ◽  
pp. 1783-1783 ◽  
Author(s):  
Sigeru Iizima ◽  
Makoto Kikuchi

2008 ◽  
Vol 87 (6) ◽  
pp. 532-536 ◽  
Author(s):  
M.F. Orellana ◽  
A.E. Nelson ◽  
J.P.R. Carey ◽  
G. Heo ◽  
D.G Boychuk ◽  
...  

Much research has been devoted to the study of etched enamel, since it is critical to bonding. Currently, there are no precise data regarding the etched-enamel specific surface area. The aim of this study was to characterize, by two different methods, the surface of human dental enamel in vitro after being etched. It was hypothesized that differences would be observed between specimens in terms of specific surface area and grade of etching. Sixteen third molar enamel samples were etched for 30 sec with 37% phosphoric acid prior to being viewed by SEM. Etched enamel surfaces were graded according to the Galil and Wright classification. The total surface area of etched samples was determined by the BET gas absorption method. A substantial variability in total surface area was observed between and among samples. A Pearson’s Correlation Coefficient showed a lack of relationship between etch pattern and total surface area.


1968 ◽  
Vol 126 (1-3) ◽  
pp. 222-226 ◽  
Author(s):  
A. R. Patel ◽  
A. S. Vagh ◽  
O. P. Bahl
Keyword(s):  

1987 ◽  
Vol 14 (2) ◽  
pp. 105-107 ◽  
Author(s):  
R. G. Oliver

The etch pattern produced on enamel from unerupted and erupted human teeth with varying periods of acid etching using 37 per cent phosphoric acid was examined using a scanning electron microscope. For erupted enamel etch scores were fairly consistent above 10 seconds etching, for unerupted enamel etch scores matched those for erupted enamel for etch times above 30 seconds. The etch type was more consistent on unerupted enamel.


1988 ◽  
Vol 15 (1) ◽  
pp. 45-49 ◽  
Author(s):  
R. G. Oliver

The effects of varying acid concentration, etch time and agitation, on the etch properties of enamel from unerupted and erupted human teeth, were examined using the scanning electron microscope. Results showed that whilst there are differences in behaviour between erupted and unerupted enamel when conditions are varied, under most circumstances unerupted enamel will behave in a similar manner to erupted enamel. With low acid concentration both the duration of etch and agitation seem to be important factors in producing a roughened surface. It is suggested that the manufacturers' recommendations be more precise for a new low acid concentration orthodontic bonding package.


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