A novel methodology for litho-to-etch pattern fidelity correction for SADP process
Keyword(s):
Design of ultra‐wideband antenna with high‐selectivity band notches using fragment‐type etch pattern
2019 ◽
Vol 62
(2)
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pp. 912-918
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1961 ◽
Vol 16
(9)
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pp. 1783-1783
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2008 ◽
Vol 87
(6)
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pp. 532-536
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Keyword(s):
1968 ◽
Vol 126
(1-3)
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pp. 222-226
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1969 ◽
Vol 72
(3)
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pp. 648-652
1987 ◽
Vol 14
(2)
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pp. 105-107
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Keyword(s):
2009 ◽
Vol 55
(2)
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pp. 340-349
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1988 ◽
Vol 15
(1)
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pp. 45-49
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Keyword(s):