Chasing sub-micrometer axial resolution in visible optical coherence tomography

2021 ◽  
Author(s):  
Gianni Nteroli ◽  
Adrian Bradu ◽  
Adrian Podoleanu
2021 ◽  
Vol 127 (4) ◽  
Author(s):  
S. Skruszewicz ◽  
S. Fuchs ◽  
J. J. Abel ◽  
J. Nathanael ◽  
J. Reinhard ◽  
...  

AbstractWe present an overview of recent results on optical coherence tomography with the use of extreme ultraviolet and soft X-ray radiation (XCT). XCT is a cross-sectional imaging method that has emerged as a derivative of optical coherence tomography (OCT). In contrast to OCT, which typically uses near-infrared light, XCT utilizes broad bandwidth extreme ultraviolet (XUV) and soft X-ray (SXR) radiation (Fuchs et al in Sci Rep 6:20658, 2016). As in OCT, XCT’s axial resolution only scales with the coherence length of the light source. Thus, an axial resolution down to the nanometer range can be achieved. This is an improvement of up to three orders of magnitude in comparison to OCT. XCT measures the reflected spectrum in a common-path interferometric setup to retrieve the axial structure of nanometer-sized samples. The technique has been demonstrated with broad bandwidth XUV/SXR radiation from synchrotron facilities and recently with compact laboratory-based laser-driven sources. Axial resolutions down to 2.2 nm have been achieved experimentally. XCT has potential applications in three-dimensional imaging of silicon-based semiconductors, lithography masks, and layered structures like XUV mirrors and solar cells.


2013 ◽  
Vol 54 (1) ◽  
pp. 746 ◽  
Author(s):  
Lili Ge ◽  
Yimin Yuan ◽  
Meixiao Shen ◽  
Aizhu Tao ◽  
Jianhua Wang ◽  
...  

2002 ◽  
Vol 27 (20) ◽  
pp. 1800 ◽  
Author(s):  
B. Povazay ◽  
K. Bizheva ◽  
A. Unterhuber ◽  
B. Hermann ◽  
H. Sattmann ◽  
...  

Optica ◽  
2017 ◽  
Vol 4 (8) ◽  
pp. 903 ◽  
Author(s):  
Silvio Fuchs ◽  
Martin Wünsche ◽  
Jan Nathanael ◽  
Johann J. Abel ◽  
Christian Rödel ◽  
...  

Electronics ◽  
2018 ◽  
Vol 7 (9) ◽  
pp. 182 ◽  
Author(s):  
Sangyeob Han ◽  
Oeon Kwon ◽  
Ruchire Wijesinghe ◽  
Pilun Kim ◽  
Unsang Jung ◽  
...  

An index-regulation technique functionalized by numerical sampling for direct calibration of the non-linear wavenumber (k)-domain to a linear domain in spectral domain optical coherence tomography (SD-OCT) is proposed. The objective of the developed method is to facilitate high-resolution identification of microstructures in biomedical imaging. Subjective optical alignments caused by nonlinear sampling of interferograms in the k-domain tend to hinder depth-dependent signal-to-noise ratios (SNR) and axial resolution in SD-OCT. Moreover, the optical-laser-dependent k-domain requires constant recalibrated in accordance with each laser transition, thereby necessitating either hardware or heavy software compensations. As the key feature of the proposed method, a relatively simple software-based k-domain mask calibration technique was developed to enable real-time linear sampling of k-domain interpolations whilst facilitating image observation through use of an index-regulation technique. Moreover, it has been confirmed that dispersion can be simultaneously compensated with noise residuals generated using the proposed technique, and that use of complex numerical or hardware techniques are no longer required. Observed results, such as fall-off, SNR, and axial resolution clearly exhibit the direct impact of the proposed technique, which could help investigators rapidly achieve optical-laser-independent high-quality SD-OCT images.


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