Response surface optimization for high-performance solid-phase crystallized silicon-germanium thin film transistors

1997 ◽  
Author(s):  
Vivek Subramanian ◽  
Krishna C. Saraswat ◽  
Howard Hovagimian ◽  
John C. Mehlhaff
Keyword(s):  
Thin Film ◽  
Response Surface ◽  
Silicon Germanium ◽  
Thin Film Transistors ◽  
High Performance ◽  
Solid Phase ◽  
Response Surface Optimization ◽  
Surface Optimization

Process to Fabricate High Performance Solid Phase Crystallized n-Type and p-Type Thin Film Transistors on Glass Substrate

1999 ◽  
Vol 67-68 ◽  
pp. 547-552 ◽  
Author(s):  
K. Mourgues ◽  
F. Raoult ◽  
Youri Helen ◽  
T. Mohammed-Brahim ◽  
R. Rogel ◽  
...  
Keyword(s):  
Thin Film ◽  
Glass Substrate ◽  
Thin Film Transistors ◽  
High Performance ◽  
Solid Phase ◽  
P Type

High-Performance Solid-Phase Crystallized Polycrystalline Silicon Thin-Film Transistors with Floating-Channel Structure

2008 ◽  
Vol 47 (4) ◽  
pp. 3024-3027
Author(s):  
Chia-Wen Chang ◽  
Chih-Kang Deng ◽  
Che-Lun Chang ◽  
Ta-Chuan Liao ◽  
Tan-Fu Lei
Keyword(s):  
Thin Film ◽  
Thin Film Transistors ◽  
Polycrystalline Silicon ◽  
High Performance ◽  
Solid Phase ◽  
Channel Structure ◽  
Silicon Thin Film
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