Real-time line-width measurements: a new feature for reticle inspection systems
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2010 ◽
Vol 130
(11)
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pp. 2039-2046
2007 ◽
Vol 22
(5)
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pp. 661-672
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2019 ◽
Vol 15
(4)
◽
pp. 2306-2319
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2020 ◽
2016 ◽
Vol 120
(25)
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pp. 13725-13731
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