Real-time line-width measurements: a new feature for reticle inspection systems

1997 ◽  
Author(s):  
Yair Eran ◽  
Gad Greenberg ◽  
Amnon Joseph ◽  
Cornel Lustig ◽  
Eyal Mizrahi
2010 ◽  
Vol 130 (11) ◽  
pp. 2039-2046
Author(s):  
Munetoshi Numada ◽  
Masaru Shimizu ◽  
Takuma Funahashi ◽  
Hiroyasu Koshimizu

2009 ◽  
Vol 29 (5) ◽  
pp. 1359-1361
Author(s):  
Tong ZHANG ◽  
Zhao LIU ◽  
Ning OUYANG

2007 ◽  
Vol 22 (5) ◽  
pp. 661-672 ◽  
Author(s):  
Kai Liu ◽  
Ke-Yan Wang ◽  
Yun-Song Li ◽  
Cheng-Ke Wu

2020 ◽  
Author(s):  
Raghav Tola ◽  
Anil Kumar Shukla ◽  
G. N. Pandey

2016 ◽  
Vol 120 (25) ◽  
pp. 13725-13731 ◽  
Author(s):  
Nathalie Kunkel ◽  
John Bartholomew ◽  
Laurent Binet ◽  
Akio Ikesue ◽  
Philippe Goldner

Sign in / Sign up

Export Citation Format

Share Document