Characterization of metal profile notching as a result of electron shading in a high-density plasma etcher
1999 ◽
Vol 28
(4)
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pp. 347-354
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Keyword(s):
2001 ◽
Vol 175-176
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pp. 585-590
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2010 ◽
Vol 8
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pp. 012017
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Keyword(s):
1997 ◽
2005 ◽
Vol 193
(1-3)
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pp. 314-318
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1997 ◽
Vol 15
(6)
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pp. 2885-2892
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