Novel low coherence metrology for nondestructive characterization of high-aspect-ratio microfabricated and micromachined structures
2006 ◽
2012 ◽
Vol 22
(5)
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pp. 055021
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Keyword(s):
2010 ◽
Vol 2010
(1)
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pp. 000703-000706
Keyword(s):
Keyword(s):
2006 ◽
Vol 179
(3)
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pp. 708-715
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2007 ◽
Vol 27
(2-3)
◽
pp. 1023-1027
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2001 ◽
Vol 19
(3)
◽
pp. 916
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Keyword(s):
2007 ◽
Vol 26-28
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pp. 601-607
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Keyword(s):