Comparison of silicon oxide films deposited by RF ion beam sputtering and e-beam gun evaporation in visible to UV ranges

2005 ◽  
Author(s):  
Jean-Yee Wu ◽  
Cheng-Chung Lee
Keyword(s):  
Silicon Oxide ◽  
Ion Beam ◽  
Oxide Films ◽  
Ion Beam Sputtering ◽  
Beam Sputtering

Ultraflat indium tin oxide films prepared by ion beam sputtering

2005 ◽  
Vol 473 (2) ◽  
pp. 218-223 ◽  
Author(s):  
Younggun Han ◽  
Donghwan Kim ◽  
Jun-Sik Cho ◽  
Seok-Keun Koh
Keyword(s):  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Ion Beam ◽  
Oxide Films ◽  
Ion Beam Sputtering ◽  
Beam Sputtering ◽  
Tin Oxide Films

Synthesis of tin oxide films by dual ion beam sputtering using Sn target and oxygen ion beam

1999 ◽  
Vol 112 (1-3) ◽  
pp. 267-270 ◽  
Author(s):  
Yong-Sahm Choe ◽  
Jae-Ho Chung ◽  
Dae-Seung Kim ◽  
Hong Koo Baik
Keyword(s):  
Tin Oxide ◽  
Ion Beam ◽  
Oxide Films ◽  
Ion Beam Sputtering ◽  
Oxygen Ion ◽  
Beam Sputtering ◽  
Dual Ion Beam Sputtering ◽  
Tin Oxide Films

Thin copper oxide films prepared by ion beam sputtering with subsequent thermal oxidation: Application in chemiresistors

2016 ◽  
Vol 389 ◽  
pp. 751-759 ◽  
Author(s):  
P. Horak ◽  
V. Bejsovec ◽  
J. Vacik ◽  
V. Lavrentiev ◽  
M. Vrnata ◽  
...  
Keyword(s):  
Copper Oxide ◽  
Thermal Oxidation ◽  
Ion Beam ◽  
Oxide Films ◽  
Ion Beam Sputtering ◽  
Beam Sputtering
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