Temperature effect on structure and surface morphology of indium tin oxide films deposited by reactive ion-beam sputtering

Vacuum ◽  
2006 ◽  
Vol 80 (7) ◽  
pp. 708-711 ◽  
Author(s):  
S. Iwatsubo
Keyword(s):  
Surface Morphology ◽  
Temperature Effect ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Ion Beam ◽  
Oxide Films ◽  
Ion Beam Sputtering ◽  
Beam Sputtering ◽  
Tin Oxide Films

Ultraflat indium tin oxide films prepared by ion beam sputtering

2005 ◽  
Vol 473 (2) ◽  
pp. 218-223 ◽  
Author(s):  
Younggun Han ◽  
Donghwan Kim ◽  
Jun-Sik Cho ◽  
Seok-Keun Koh
Keyword(s):  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Ion Beam ◽  
Oxide Films ◽  
Ion Beam Sputtering ◽  
Beam Sputtering ◽  
Tin Oxide Films

In situ electrical and mechanical study of Indium Tin Oxide films deposited on polyimide substrate by Xe ion beam sputtering

2022 ◽  
Vol 741 ◽  
pp. 139035
Author(s):  
T. Chommaux ◽  
P.O. Renault ◽  
D. Thiaudière ◽  
P. Godard ◽  
F. Paumier ◽  
...  
Keyword(s):  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Ion Beam ◽  
Oxide Films ◽  
Ion Beam Sputtering ◽  
Polyimide Substrate ◽  
Mechanical Study ◽  
Beam Sputtering ◽  
Tin Oxide Films

Effects of annealing on the properties of indium–tin oxide films prepared by ion beam sputtering

2005 ◽  
Vol 192 (1) ◽  
pp. 106-111 ◽  
Author(s):  
Ding-Fwu Lii ◽  
Jow-Lay Huang ◽  
Iau-Jiue Jen ◽  
Su-Shia Lin ◽  
Pavol Sajgalik
Keyword(s):  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Ion Beam ◽  
Oxide Films ◽  
Ion Beam Sputtering ◽  
Beam Sputtering ◽  
Tin Oxide Films

Synthesis of tin oxide films by dual ion beam sputtering using Sn target and oxygen ion beam

1999 ◽  
Vol 112 (1-3) ◽  
pp. 267-270 ◽  
Author(s):  
Yong-Sahm Choe ◽  
Jae-Ho Chung ◽  
Dae-Seung Kim ◽  
Hong Koo Baik
Keyword(s):  
Tin Oxide ◽  
Ion Beam ◽  
Oxide Films ◽  
Ion Beam Sputtering ◽  
Oxygen Ion ◽  
Beam Sputtering ◽  
Dual Ion Beam Sputtering ◽  
Tin Oxide Films

Properties and Surface Morphology of Indium Tin Oxide Films Prepared by Electron Shower Method

1993 ◽  
Vol 32 (Part 1, No. 3A) ◽  
pp. 1204-1209 ◽  
Author(s):  
Hisami Yumoto ◽  
Jyun Hatano ◽  
Tuneo Watanabe ◽  
Kazuhiro Fujikawa ◽  
Hironobu Sato
Keyword(s):  
Surface Morphology ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Oxide Films ◽  
Tin Oxide Films ◽  
Electron Shower

Preparation and characterization of indium tin oxide films formed by oxygen ion beam assisted deposition

2003 ◽  
Vol 126 (9) ◽  
pp. 509-513 ◽  
Author(s):  
C. Liu ◽  
T. Mihara ◽  
T. Matsutani ◽  
T. Asanuma ◽  
M. Kiuchi
Keyword(s):  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Ion Beam ◽  
Oxide Films ◽  
Oxygen Ion ◽  
Ion Beam Assisted Deposition ◽  
Tin Oxide Films
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