Reactive Ion Etching of Al-1%Cu alloy thin films
1986 ◽
Vol 4
(3)
◽
pp. 440-442
◽
Keyword(s):
Keyword(s):
Reactive ion etching of Pb(Zr[sub x]Ti[sub 1−x])O[sub 3] thin films in an inductively coupled plasma
1998 ◽
Vol 16
(4)
◽
pp. 1894
◽
Keyword(s):
1998 ◽
Vol 13
(2)
◽
pp. 362-367
◽
1999 ◽
Vol 116-119
◽
pp. 456-460
◽
2007 ◽
Vol 90
(1)
◽
pp. 95-106
◽
Keyword(s):