Hydrogenated Amorphous Silicon Films Prepared By rf Sputtering In He/H2
Keyword(s):
1982 ◽
Vol 11-12
◽
pp. 528-534
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Keyword(s):
2016 ◽
Vol 55
(4S)
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pp. 04ES05
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Keyword(s):
1999 ◽
Vol 17
(6)
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pp. 3240-3245
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2000 ◽
Vol 266-269
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pp. 304-308
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Keyword(s):
1994 ◽