Investigation of the structure, elemental and phase composition of coatings on the basis of oxynitride titanium deposited by reactive magnetron sputtering
2014 ◽
Vol 8
(6)
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pp. 1230-1234
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Keyword(s):
High Temperature Material Processes (An International Quarterly of High-Technology Plasma Processes)
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2015 ◽
Vol 19
(2)
◽
pp. 105-112
Keyword(s):
Structure and Electrical Property of CuInS2 Thin Films Deposited by DC Reactive Magnetron Sputtering
2011 ◽
Vol 26
(12)
◽
pp. 1287-1292
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2019 ◽
Vol 37
(2)
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pp. 021203
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2011 ◽
Vol 21
(4)
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pp. 770-776
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1992 ◽
Vol 13
(2-3)
◽
pp. 157-160
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