ENERGETIC CLUSTER IMPACT (ECI): A NEW METHOD FOR THIN-FILM FORMATION
1996 ◽
Vol 03
(01)
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pp. 887-890
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A completely ionized beam of metal clusters is deposited with variable kinetic energy on a substrate. Mirror-like and strongly adhering films having unusual properties are produced for sufficiently high cluster impact energies. Numerical simulations provide the physical insight why this novel technique gives different, and sometimes superior results compared to conventional methods. Several examples are presented.
1997 ◽
Vol 386
(1-3)
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pp. 231-240
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1989 ◽
Vol 37-38
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pp. 794-798
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2003 ◽
Vol 169-170
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pp. 613-615
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