Growth of Gaseous Macromolecules in the Downstream Region of Perfluorocompounds Plasmas-Observation, Reaction Mechanism, Thin Film Formation-
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2003 ◽
Vol 169-170
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pp. 613-615
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2018 ◽
Vol 122
(31)
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pp. 6438-6444
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2017 ◽
Vol 19
(38)
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pp. 26085-26097
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2018 ◽
Vol 29
(21)
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pp. 18397-18403
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2017 ◽
Vol 9
(7)
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pp. 6237-6245
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