Role of kinetic energy of sputtered particles in thin film formation

1997 ◽  
Vol 386 (1-3) ◽  
pp. 231-240 ◽  
Author(s):  
Yasunori Taga ◽  
Riichi Takahasi
Keyword(s):  
Thin Film ◽  
Kinetic Energy ◽  
Film Formation ◽  
Thin Film Formation

ENERGETIC CLUSTER IMPACT (ECI): A NEW METHOD FOR THIN-FILM FORMATION

1996 ◽  
Vol 03 (01) ◽  
pp. 887-890 ◽  
Author(s):  
HELLMUT HABERLAND ◽  
MICHAEL MOSELER ◽  
YOU QIANG ◽  
OLIVER RATTUNDE ◽  
THOMAS REINERS ◽  
...  
Keyword(s):  
Thin Film ◽  
Kinetic Energy ◽  
Numerical Simulations ◽  
Metal Clusters ◽  
Film Formation ◽  
Novel Technique ◽  
Physical Insight ◽  
Thin Film Formation ◽  
Impact Energies ◽  
High Cluster

A completely ionized beam of metal clusters is deposited with variable kinetic energy on a substrate. Mirror-like and strongly adhering films having unusual properties are produced for sufficiently high cluster impact energies. Numerical simulations provide the physical insight why this novel technique gives different, and sometimes superior results compared to conventional methods. Several examples are presented.

scholarly journals Growth of Gaseous Macromolecules in the Downstream Region of Perfluorocompounds Plasmas-Observation, Reaction Mechanism, Thin Film Formation-

Shinku ◽  
2006 ◽  
Vol 49 (3) ◽  
pp. 195-197
Author(s):  
Kenji FURUYA ◽  
Shinobu YUKITA ◽  
Hiroshi OKUMURA ◽  
Ryoichi NAKANISHI ◽  
Makoto MAKITA ◽  
...  
Keyword(s):  
Thin Film ◽  
Reaction Mechanism ◽  
Film Formation ◽  
Downstream Region ◽  
Thin Film Formation

A facile room temperature chemical transformation approach for binder-free thin film formation of Ag2Te and lithiation/delithiation chemistry of the film

2016 ◽  
Vol 45 (43) ◽  
pp. 17312-17318 ◽  
Author(s):  
Eun-Kyung Kim ◽  
Dasom Park ◽  
Nabeen K. Shrestha ◽  
Jinho Chang ◽  
Cheol-Woo Yi ◽  
...  
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Aqueous Solution ◽  
Ion Exchange ◽  
Chemical Transformation ◽  
Room Temperature ◽  
Film Formation ◽  
Synthetic Method ◽  
Binder Free ◽  
Thin Film Formation

An aqueous solution based synthetic method for binder-free Ag2Te thin films using ion exchange induced chemical transformation of Ag/AgxO thin films.

Giant magnetostrictive thin film formation by plasma process

2003 ◽  
Vol 169-170 ◽  
pp. 613-615 ◽  
Author(s):  
T. Yamaki ◽  
M. Sekine ◽  
T. Haraki ◽  
H. Uchida ◽  
Y. Matsumura
Keyword(s):  
Thin Film ◽  
Film Formation ◽  
Plasma Process ◽  
Thin Film Formation
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