Preparation of Dielectric Thin Films from Photosensitive Sol-Gel Solution

1994 ◽  
Vol 33 (Part 1, No. 9B) ◽  
pp. 5268-5271 ◽  
Author(s):  
Nobuyuki Soyama ◽  
Go Sasaki ◽  
Tsutomu Atsuki ◽  
Tadashi Yonezawa ◽  
Katsumi Ogi
Keyword(s):  
Thin Films ◽  
Sol Gel ◽  
Dielectric Thin Films

Sol-gel derived TiNb2 O7 dielectric thin films for transparent electronic applications

2017 ◽  
Vol 101 (2) ◽  
pp. 674-682 ◽  
Author(s):  
Ming-Chuan Chang ◽  
Chieh-Szu Huang ◽  
Yi-Da Ho ◽  
Cheng-Liang Huang
Keyword(s):  
Thin Films ◽  
Sol Gel ◽  
Dielectric Thin Films

Electrical properties of silica-polyimide composite dielectric thin films prepared via sol-gel reaction and thermal imidization

1997 ◽  
Vol 85 (1-3) ◽  
pp. 1399-1400 ◽  
Author(s):  
Y. Kim ◽  
E. Kang ◽  
Y.S. Kwon ◽  
W.J. Cho ◽  
C. Cho ◽  
...  
Keyword(s):  
Thin Films ◽  
Electrical Properties ◽  
Sol Gel ◽  
Dielectric Thin Films ◽  
Thermal Imidization

Structure and Characteristics of ZrO2 Dielectric Thin Films by Sol-Gel Technique

2014 ◽  
Vol 602-603 ◽  
pp. 767-770 ◽  
Author(s):  
Ching Fang Tseng ◽  
Chiu Yun Chen ◽  
Pei Wen Huang
Keyword(s):  
Thin Films ◽  
Dielectric Properties ◽  
Annealing Temperature ◽  
Substrate Surface ◽  
Sol Gel ◽  
Dielectric Thin Films ◽  
Dielectric Characteristics ◽  
Impedance Analyzer ◽  
Annealing Temperatures ◽  
Gel Technique

Dielectric properties and microstructures of ZrO2thin films prepared by the sol-gel method at different annealing temperatures have been investigated. All films exhibited ZrO2(111) highly orientation perpendicular to the substrate surface and the grain size increased with increasing annealing temperature. Dielectric properties of the Ag/ZrO2/Ag/Si structure were measured by using HP 4192 Impedance Analyzer and Agilent 4155 Semiconductor Parameter Analyzer. The dependence of the microstructure and dielectric characteristics on annealing temperature was also investigated.

Properties of Sr(La0.93Nd0.07)4Ti4O15 Dielectric Thin Films by Sol–Gel Method

2016 ◽  
Vol 16 (12) ◽  
pp. 12910-12913
Author(s):  
Yu-Hang Yang ◽  
Wen-Shiush Chen ◽  
Jen-Chieh Liu ◽  
Cheng-Hsing Hsu
Keyword(s):  
Thin Films ◽  
Sol Gel ◽  
Dielectric Thin Films ◽  
Gel Method ◽  
Sol Gel Method

Processing and characterisation of sol–gel deposited Ta2O5 and TiO2–Ta2O5 dielectric thin films

1999 ◽  
Vol 43 (6) ◽  
pp. 1095-1099 ◽  
Author(s):  
A Cappellani ◽  
J.L Keddie ◽  
N.P Barradas ◽  
S.M Jackson
Keyword(s):  
Thin Films ◽  
Sol Gel ◽  
Dielectric Thin Films

Preparation and Characterizations of High-K (Ca, Sr)ZrO3 Gate Dielectric Thin Films by Sol-Gel Technology

2004 ◽  
Vol 61 (1) ◽  
pp. 25-35 ◽  
Author(s):  
W. ZHU ◽  
T. YU ◽  
C. H. CHEN ◽  
X. F. CHEN ◽  
R. G. KRISHNAN
Keyword(s):  
Thin Films ◽  
Gate Dielectric ◽  
Sol Gel ◽  
Dielectric Thin Films ◽  
High K
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