High Quality $\bf Nb/Al\mbox{--}AlO_{\ninmbi x}\mbox{--}Al/Nb$ Josephson Junctions by Electron Beam Evaporation

AbstractAn electron beam evaporation method has been used to prepare tin doped indium oxide (ITO) films with 95 wt.% In2O3 and 5 wt.% SnO2 in an oxygen atmosphere. It was found that the deposition rate and oxygen pressure strongly influence the film properties when the substrate temperature was lower than 200°C. In an optimal condition, highly transparent (transmittance ˜ 90% at wavelength 570 nm) and conductive (resistivity – 3×10−4Ω-cm) films of thickness around 2000 Å at substrate temperature as low as 180°C can be obtained.

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High quality Si/Si1−xGexlayered structures grown using a mass‐spectrometry controlled electron‐beam evaporation system

Applied Physics Letters ◽

10.1063/1.112913 ◽

1994 ◽

Vol 65 (14) ◽

pp. 1772-1774 ◽

Cited By ~ 18

Author(s):

W.‐X. Ni ◽

A. Henry ◽

M. I. Larsson ◽

K. Joelsson ◽

G. V. Hansson

Keyword(s):

Mass Spectrometry ◽

Electron Beam ◽

Electron Beam Evaporation ◽

High Quality

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High quality YBa2Cu3O7 Josephson junctions made by direct electron beam writing

Applied Physics Letters ◽

10.1063/1.110688 ◽

1993 ◽

Vol 63 (12) ◽

pp. 1696-1698 ◽

Cited By ~ 45

Author(s):

S. K. Tolpygo ◽

S. Shokhor ◽

B. Nadgorny ◽

J.‐Y. Lin ◽

M. Gurvitch ◽

...

Keyword(s):

Electron Beam ◽

Josephson Junctions ◽

High Quality

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High-Quality ZrO 2 Thin Films Deposited on Silicon by High Vacuum Electron Beam Evaporation

Chinese Physics Letters ◽

10.1088/0256-307x/19/3/333 ◽

2002 ◽

Vol 19 (3) ◽

pp. 395-397 ◽

Cited By ~ 6

Author(s):

Zhang Ning-Lin ◽

Wan Qing ◽

Song Zhi-Tang ◽

Shen Qin-Wo ◽

Zhu Xiang-Rong ◽

...

Keyword(s):

Thin Films ◽

Electron Beam ◽

High Vacuum ◽

Electron Beam Evaporation ◽

High Quality

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High-quality and full-coverage CsPbBr3 thin films via electron beam evaporation with post-annealing treatment for all-inorganic perovskite solar cells

Solar Energy ◽

10.1016/j.solener.2022.01.009 ◽

2022 ◽

Vol 232 ◽

pp. 320-327

Author(s):

Linlin Liu ◽

Shi-E. Yang ◽

Ping Liu ◽

Yongsheng Chen

Keyword(s):

Thin Films ◽

Electron Beam ◽

Solar Cells ◽

Perovskite Solar Cells ◽

Annealing Treatment ◽

Electron Beam Evaporation ◽

High Quality ◽

Inorganic Perovskite ◽

Full Coverage ◽

Post Annealing

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Characterization and Raman investigations on high-quality ZnO thin films fabricated by reactive electron beam evaporation technique

Journal of Crystal Growth ◽

10.1016/j.jcrysgro.2005.02.035 ◽

2005 ◽

Vol 279 (3-4) ◽

pp. 394-402 ◽

Cited By ~ 49

Author(s):

R. Al Asmar ◽

J.P. Atanas ◽

M. Ajaka ◽

Y. Zaatar ◽

G. Ferblantier ◽

...

Keyword(s):

Thin Films ◽

Electron Beam ◽

Electron Beam Evaporation ◽

Zno Thin Films ◽

High Quality ◽

Electron Beam Evaporation Technique ◽

Evaporation Technique

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CNT Extracted Lithography

Microelectromechanical Systems ◽

10.1115/imece2003-41549 ◽

2003 ◽

Author(s):

Jaehyun Chung ◽

Kyong-Hoon Lee ◽

Junghoon Lee

Keyword(s):

Carbon Nanotubes ◽

Electron Beam ◽

Electric Field ◽

High Accuracy ◽

Electron Beam Evaporation ◽

Metal Deposition ◽

High Quality ◽

Guided Assembly ◽

Nanoscale Features

High quality nanoscale gaps were fabricated using carbon nanotubes (CNTs) as shadow masks for metal deposition. We used electric-field guided assembly to deposit and individual multi-walled CNT (MWCNT) across a pair of electrodes. Metal was deposited by electron-beam evaporation on the substrate where MWCNT was assembled. Then, the MWCNT was removed by sonication, leaving a pattern that replicates the shape of the MWCNT. This approach enables a mass fabrication of well-defined nanoscale features aligned and positioned with high accuracy.

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