\bfi In situ Monitoring of Product Species in Plasma Etching by Fourier Transform Infrared Absorption Spectroscopy

1995 ◽  
Vol 34 (Part 1, No. 7A) ◽  
pp. 3731-3736 ◽  
Author(s):  
Kazuyasu Nishikawa ◽  
Kouichi Ono ◽  
Mutumi Tuda ◽  
Tatsuo Oomori ◽  
Keisuke Namba
Keyword(s):  
Fourier Transform ◽  
Absorption Spectroscopy ◽  
Plasma Etching ◽  
Infrared Absorption ◽  
Fourier Transform Infrared ◽  
In Situ Monitoring ◽  
Infrared Absorption Spectroscopy ◽  
Product Species

Fourier-Transform Infrared Absorption Spectroscopy of Chromium Nitride Thin Film

2011 ◽  
Vol 50 ◽  
pp. 01BE03 ◽  
Author(s):  
Jun Shirahata ◽  
Tetsutaro Ohori ◽  
Hiroki Asami ◽  
Tsuneo Suzuki ◽  
Tadachika Nakayama ◽  
...  
Keyword(s):  
Thin Film ◽  
Fourier Transform ◽  
Absorption Spectroscopy ◽  
Infrared Absorption ◽  
Fourier Transform Infrared ◽  
Chromium Nitride ◽  
Infrared Absorption Spectroscopy

Fourier-Transform Infrared Absorption Spectroscopy of Chromium Nitride Thin Film

2011 ◽  
Vol 50 (1S2) ◽  
pp. 01BE03 ◽  
Author(s):  
Jun Shirahata ◽  
Tetsutaro Ohori ◽  
Hiroki Asami ◽  
Tsuneo Suzuki ◽  
Tadachika Nakayama ◽  
...  
Keyword(s):  
Thin Film ◽  
Fourier Transform ◽  
Absorption Spectroscopy ◽  
Infrared Absorption ◽  
Fourier Transform Infrared ◽  
Chromium Nitride ◽  
Infrared Absorption Spectroscopy

Detection of ClCO with time-resolved Fourier-transform infrared absorption spectroscopy

2001 ◽  
Vol 333 (5) ◽  
pp. 365-370 ◽  
Author(s):  
Shih-Hao Chen ◽  
Li-Kung Chu ◽  
Yu-Ju Chen ◽  
I-Chia Chen ◽  
Yuan-Pern Lee
Keyword(s):  
Fourier Transform ◽  
Absorption Spectroscopy ◽  
Infrared Absorption ◽  
Fourier Transform Infrared ◽  
Infrared Absorption Spectroscopy ◽  
Time Resolved
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