The Characterization of Surface Acoustic Wave Modes on Rotated Y-Cut Quartz (ST-X Quartz) with Different AlN Film Thickness

2001 ◽  
Vol 40 (Part 1, No. 7) ◽  
pp. 4590-4592 ◽  
Author(s):  
Maw-Shung Lee ◽  
Feng-Chih Chang ◽  
Sean Wu ◽  
Long Wu
Keyword(s):  
Acoustic Wave ◽  
Film Thickness ◽  
Surface Acoustic Wave ◽  
Aln Film ◽  
Wave Modes

ZnO film thickness effect on surface acoustic wave modes and acoustic streaming

2008 ◽  
Vol 93 (9) ◽  
pp. 094105 ◽  
Author(s):  
X. Y. Du ◽  
Y. Q. Fu ◽  
S. C. Tan ◽  
J. K. Luo ◽  
A. J. Flewitt ◽  
...  
Keyword(s):  
Acoustic Wave ◽  
Film Thickness ◽  
Surface Acoustic Wave ◽  
Acoustic Streaming ◽  
Thickness Effect ◽  
Zno Film ◽  
Wave Modes

Surface acoustic wave devices fabricated on epitaxial AlN film

2016 ◽  
Vol 09 (02) ◽  
pp. 1650034 ◽  
Author(s):  
Junning Gao ◽  
Zhibiao Hao ◽  
Lang Niu ◽  
Lai Wang ◽  
Changzheng Sun ◽  
...  
Keyword(s):  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Epitaxial Film ◽  
Stop Band ◽  
Crystalline Quality ◽  
Center Frequency ◽  
Pass Band ◽  
Saw Devices ◽  
Aln Film

This paper reports surface acoustic wave (SAW) devices fabricated on AlN epitaxial film grown on sapphire, aiming to avoid the detrimental polarization axis inconsistency and refrained crystalline quality of the normally used polycrystalline AlN films. Devices with center frequency of 357 MHz and 714 MHz have been fabricated. The stop band rejection ratio of the as-obtained device reaches 24.5 dB and the pass band ripple is profoundly smaller compared to most of the reported AlN SAW devices with the similar configuration. Judging from the rather high edge dislocation level of the film used in this study, the properties of the SAW devices have great potential to be improved by further improving the crystalline quality of the film. It is then concluded that the AlN epitaxial film is favorable for high quality SAW devices to meet the high frequency and low power consumption challenges facing the signal processing components.

In situ high-temperature characterization of AlN-based surface acoustic wave devices

2013 ◽  
Vol 114 (1) ◽  
pp. 014505 ◽  
Author(s):  
Thierry Aubert ◽  
Jochen Bardong ◽  
Ouarda Legrani ◽  
Omar Elmazria ◽  
M. Badreddine Assouar ◽  
...  
Keyword(s):  
High Temperature ◽  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Acoustic Wave Devices

Characterization of the surface acoustic wave induced potential in a heterostructure

1992 ◽  
Vol 84 (7) ◽  
pp. 735-738 ◽  
Author(s):  
J.W.M. Campbell ◽  
F. Guillon ◽  
M. D'Iorio ◽  
M. Buchanan ◽  
R.J. Stoner
Keyword(s):  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Wave Induced

Growth and Characterization of Polyimide-Supported AlN Films for Flexible Surface Acoustic Wave Devices

2016 ◽  
Vol 45 (6) ◽  
pp. 2702-2709 ◽  
Author(s):  
Qi Li ◽  
Hongyan Liu ◽  
Gen Li ◽  
Fei Zeng ◽  
Feng Pan ◽  
...  
Keyword(s):  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Flexible Surface ◽  
Acoustic Wave Devices
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