Evaluation of Longitudinal Displacement for Lead Zirconate Titanate Films

2002 ◽  
Vol 41 (Part 1, No. 11B) ◽  
pp. 6735-6738 ◽  
Author(s):  
Takashi Iijima ◽  
Sachiko Ito ◽  
Hirofumi Matsuda
Keyword(s):  
Lead Zirconate Titanate ◽  
Lead Zirconate ◽  
Longitudinal Displacement ◽  
Zirconate Titanate

Piezoelectric Response of Lanthanum Doped Lead Zirconate Titanate Films for Micro Actuators Application

2008 ◽  
Vol 1129 ◽  
Author(s):  
Takashi Iijima ◽  
Bong-Yeon Lee ◽  
Seiji Fukuyama
Keyword(s):  
Lead Zirconate Titanate ◽  
Deposition Process ◽  
Lead Zirconate ◽  
Test System ◽  
Piezoelectric Response ◽  
Longitudinal Displacement ◽  
Hysteresis Curves ◽  
Si Substrates ◽  
Zirconate Titanate ◽  
La Substitution

AbstractLa doped lead zirconate titanate (PLZT) films are prepared using a chemical solution deposition process. The effect of La substitution on the piezoelectric response was investigated to clear the possibility of the micro actuator application for the PLZT films. Nominal compositions of the 10% Pb excess PLZT precursor solutions were controlled like La/Zr/Ti= 0/65/35, 3/65/35, 6/65/35, and 9/65/35. These precursor solutions were deposited on the Ir/Ti/SiO2/Si substrates, and the thickness of the PLZT films was 2μm. 10 to 20- μm- diameter Pt top electrodes are formed with a sputtering and a photolithography process. The polarization- field (P-E) hysteresis curves and the longitudinal displacement curves were measured with a twin beam laser interferometer connected with a ferroelectric test system. With increasing La substitution amount, the P-E hysteresis curves became slim shape, and remnant polarization (Pr) decreased. The hysteresis of the piezoelectric longitudinal displacement curves also decreased with increasing La substitution amount. The amount of the displacement under unipolar electric field showed a peak at La/Zr/Ti= 3/65/35. The calculated effective longitudinal piezoelectric constant (d33eff) is 129.2 pm/V at 3/65/35. This amount was relatively higher than that of PZT films at morphotropic phase boundary (MPB: 0/53/47) composition prepared the same film preparation process.

Effect of Diameter on Longitudinal Displacement in Disk Shape 10-μm-thick Lead Zirconate Titanate Films

2005 ◽  
Vol 902 ◽  
Author(s):  
Takashi Iijima ◽  
Satoko Osone ◽  
Yoshiro Shimojo ◽  
Hirotake Okino ◽  
Takashi Yamamoto
Keyword(s):  
Lead Zirconate Titanate ◽  
Lead Zirconate ◽  
Longitudinal Displacement ◽  
Disk Diameter ◽  
Poling Process ◽  
Si Substrates ◽  
Zirconate Titanate ◽  
Pzt Films ◽  
Before And After ◽  
Thick Lead

AbstractMicro-machined piezoelectric film devices are usually fabricated onto substrates, so that the displacement response of the film is clamped with the substrate. To investigate the longitudinal displacement behavior of 10-μm-thick lead zirconate titanate (PZT) films deposited onto Si substrates, disk shape structures with diameters of 20 to 80-μm were fabricated by an reactive ion etching (RIE) process. The polarization-field (P-E) hysteresis curves did not show a remarkable difference with decreasing the PZT disk diameter. On the other hand, unipolar driven longitudinal displacement increased, and the amount of the displacement was saturated at a diameter of 30 and 20 μm. The AFM measured longitudinal piezoelectric constants, AFM d33, were estimated in the case of before poling and after poling at 100V for 10 min. The AFM d33 for the before and after poling process were 65 and 94 pm/V for 80-μm-diameter film disk, and 153 and 315 pm/V for 20-μm-diameter film disk, respectively. The value of poled AFM d33 for 20-μm-diameter film disk was comparable to bulk PZT ceramics. These results suggest that the decrease of the disk diameter reduces the Si substrate bending related with the clamping effect between the film and substrate, and facilitates domain reorientation in the poling process. It seems that the actual piezoelectric constant of films can be estimated from the longitudinal displacement when the ratio of the PZT disk diameter, d, to the PZT film thickness, t, shows d/t < 3 for 10-μm-thick PZT films.

Convergent-bceam diffraction studies on lead zirconate titanate Ceramics

1986 ◽  
Vol 44 ◽  
pp. 482-483
Author(s):  
M.L.A. Dass ◽  
T.A. Bielicki ◽  
G. Thomas ◽  
T. Yamamoto ◽  
K. Okazaki
Keyword(s):  
Lead Zirconate Titanate ◽  
Direct Proof ◽  
Lead Zirconate ◽  
Subsolidus Phase ◽  
Pzt Ceramics ◽  
Subsolidus Phase Diagram ◽  
Zirconate Titanate ◽  
Two Phases ◽  
Cbd Method ◽  
Titanate Ceramics

Lead zirconate titanate, Pb(Zr,Ti)O3 (PZT), ceramics are ferroelectrics formed as solid solutions between ferroelectric PbTiO3 and ant iferroelectric PbZrO3. The subsolidus phase diagram is shown in figure 1. PZT transforms between the Ti-rich tetragonal (T) and the Zr-rich rhombohedral (R) phases at a composition which is nearly independent of temperature. This phenomenon is called morphotropism, and the boundary between the two phases is known as the morphotropic phase boundary (MPB). The excellent piezoelectric and dielectric properties occurring at this composition are believed to.be due to the coexistence of T and R phases, which results in easy poling (i.e. orientation of individual grain polarizations in the direction of an applied electric field). However, there is little direct proof of the coexistence of the two phases at the MPB, possibly because of the difficulty of distinguishing between them. In this investigation a CBD method was found which would successfully differentiate between the phases, and this was applied to confirm the coexistence of the two phases.

Processing of porous lead titanate and lead zirconate titanate coatings

1998 ◽  
Vol 08 (PR9) ◽  
pp. Pr9-27-Pr9-31
Author(s):  
J. S. Wright ◽  
L. F. Francis
Keyword(s):  
Lead Zirconate Titanate ◽  
Lead Titanate ◽  
Lead Zirconate ◽  
Zirconate Titanate

Fabrication of Bimorph Lead Zirconate Titanate Thick Films on Metal Substrates Via the Cold Sintering Process

2020 ◽  
Author(s):  
Dixiong Wang ◽  
Sinan Dursun ◽  
Lisheng Gao ◽  
Carl S. Morandi ◽  
Clive A. Randall ◽  
...  
Keyword(s):  
Lead Zirconate Titanate ◽  
Thick Films ◽  
Lead Zirconate ◽  
Sintering Process ◽  
Metal Substrates ◽  
Zirconate Titanate

scholarly journals Direct Current-Bias Dependence of Nonlinear Coefficients in Lead Zirconate Titanate Piezoelectric Ceramics

2005 ◽  
Vol 113 (1322) ◽  
pp. 642-646 ◽  
Author(s):  
Shinjiro TASHIRO ◽  
Wataru TOKUNAGA ◽  
Keisuke ISHII ◽  
Kunihiro NAGATA
Keyword(s):  
Lead Zirconate Titanate ◽  
Direct Current ◽  
Piezoelectric Ceramics ◽  
Lead Zirconate ◽  
Zirconate Titanate ◽  
Direct Current Bias

New synthesis route for lead zirconate titanate powder

2016 ◽  
Vol 42 (6) ◽  
pp. 6782-6790 ◽  
Author(s):  
Linggen Kong ◽  
Inna Karatchevtseva ◽  
Rohan Holmes ◽  
Joel Davis ◽  
Yingjie Zhang ◽  
...  
Keyword(s):  
Lead Zirconate Titanate ◽  
Lead Zirconate ◽  
Synthesis Route ◽  
Zirconate Titanate ◽  
New Synthesis
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