Piezoelectric Response of Lanthanum Doped Lead Zirconate Titanate Films for Micro Actuators Application

2008 ◽  
Vol 1129 ◽  
Author(s):  
Takashi Iijima ◽  
Bong-Yeon Lee ◽  
Seiji Fukuyama
Keyword(s):  
Lead Zirconate Titanate ◽  
Deposition Process ◽  
Lead Zirconate ◽  
Test System ◽  
Piezoelectric Response ◽  
Longitudinal Displacement ◽  
Hysteresis Curves ◽  
Si Substrates ◽  
Zirconate Titanate ◽  
La Substitution

AbstractLa doped lead zirconate titanate (PLZT) films are prepared using a chemical solution deposition process. The effect of La substitution on the piezoelectric response was investigated to clear the possibility of the micro actuator application for the PLZT films. Nominal compositions of the 10% Pb excess PLZT precursor solutions were controlled like La/Zr/Ti= 0/65/35, 3/65/35, 6/65/35, and 9/65/35. These precursor solutions were deposited on the Ir/Ti/SiO2/Si substrates, and the thickness of the PLZT films was 2μm. 10 to 20- μm- diameter Pt top electrodes are formed with a sputtering and a photolithography process. The polarization- field (P-E) hysteresis curves and the longitudinal displacement curves were measured with a twin beam laser interferometer connected with a ferroelectric test system. With increasing La substitution amount, the P-E hysteresis curves became slim shape, and remnant polarization (Pr) decreased. The hysteresis of the piezoelectric longitudinal displacement curves also decreased with increasing La substitution amount. The amount of the displacement under unipolar electric field showed a peak at La/Zr/Ti= 3/65/35. The calculated effective longitudinal piezoelectric constant (d33eff) is 129.2 pm/V at 3/65/35. This amount was relatively higher than that of PZT films at morphotropic phase boundary (MPB: 0/53/47) composition prepared the same film preparation process.

Top Electrode Area Dependence on Displacement Property of Lead Zirconate Titanate Films Prepared by Chemical Solution Deposition Process

2002 ◽  
Vol 748 ◽  
Author(s):  
Takashi Iijima ◽  
Sachiko Ito ◽  
Hirofumi Matsuda
Keyword(s):  
Lead Zirconate Titanate ◽  
Ferroelectric Properties ◽  
Strain Curve ◽  
Deposition Process ◽  
Lead Zirconate ◽  
Test System ◽  
Piezoelectric Response ◽  
Hysteresis Curve ◽  
Electrode Diameter ◽  
Maximum Displacement

ABSTRACTEffects on ferroelectric and piezoelectric properties of top-electrode diameter variance from 80 to 8 μm were investigated using an AFM probing system connected with a ferroelectric test system with bipolar and unipolar signals at 5 Hz. The Pt and 1.2-μm-thick PZT layers were etched off to prepare Pt top electrode etched samples or Pt/PZT stack etched samples. In the case of bipolar measurement, the top electrode diameter did not affect ferroelectric properties, while the maximum displacement of the butterfly-shaped hysteresis curve, related with piezoelectric response, increased with decreasing top-electrode diameter. On the other hand, the longitudinal piezoelectric constant, AFM d33, calculated from the strain curve slope at 5 Hz, +5 V, increased with decreasing top-electrode diameter. The average value of the Pt/PZT stack-etched AFM d33 almost equals that of Pt-etched AFM d33. Average AFM d33 of the 8-μm-diameter Pt-etched and Pt/PZT stack-etched samples are 129 and 135 pm/V, respectively.

Effect of Diameter on Longitudinal Displacement in Disk Shape 10-μm-thick Lead Zirconate Titanate Films

2005 ◽  
Vol 902 ◽  
Author(s):  
Takashi Iijima ◽  
Satoko Osone ◽  
Yoshiro Shimojo ◽  
Hirotake Okino ◽  
Takashi Yamamoto
Keyword(s):  
Lead Zirconate Titanate ◽  
Lead Zirconate ◽  
Longitudinal Displacement ◽  
Disk Diameter ◽  
Poling Process ◽  
Si Substrates ◽  
Zirconate Titanate ◽  
Pzt Films ◽  
Before And After ◽  
Thick Lead

AbstractMicro-machined piezoelectric film devices are usually fabricated onto substrates, so that the displacement response of the film is clamped with the substrate. To investigate the longitudinal displacement behavior of 10-μm-thick lead zirconate titanate (PZT) films deposited onto Si substrates, disk shape structures with diameters of 20 to 80-μm were fabricated by an reactive ion etching (RIE) process. The polarization-field (P-E) hysteresis curves did not show a remarkable difference with decreasing the PZT disk diameter. On the other hand, unipolar driven longitudinal displacement increased, and the amount of the displacement was saturated at a diameter of 30 and 20 μm. The AFM measured longitudinal piezoelectric constants, AFM d33, were estimated in the case of before poling and after poling at 100V for 10 min. The AFM d33 for the before and after poling process were 65 and 94 pm/V for 80-μm-diameter film disk, and 153 and 315 pm/V for 20-μm-diameter film disk, respectively. The value of poled AFM d33 for 20-μm-diameter film disk was comparable to bulk PZT ceramics. These results suggest that the decrease of the disk diameter reduces the Si substrate bending related with the clamping effect between the film and substrate, and facilitates domain reorientation in the poling process. It seems that the actual piezoelectric constant of films can be estimated from the longitudinal displacement when the ratio of the PZT disk diameter, d, to the PZT film thickness, t, shows d/t < 3 for 10-μm-thick PZT films.

scholarly journals Conformable amplified lead zirconate titanate sensors with enhanced piezoelectric response for cutaneous pressure monitoring

2014 ◽  
Vol 5 (1) ◽  
Author(s):  
Canan Dagdeviren ◽  
Yewang Su ◽  
Pauline Joe ◽  
Raissa Yona ◽  
Yuhao Liu ◽  
...  
Keyword(s):  
Lead Zirconate Titanate ◽  
Lead Zirconate ◽  
Piezoelectric Response ◽  
Pressure Monitoring ◽  
Zirconate Titanate

Evaluation of Longitudinal Displacement for Lead Zirconate Titanate Films

2002 ◽  
Vol 41 (Part 1, No. 11B) ◽  
pp. 6735-6738 ◽  
Author(s):  
Takashi Iijima ◽  
Sachiko Ito ◽  
Hirofumi Matsuda
Keyword(s):  
Lead Zirconate Titanate ◽  
Lead Zirconate ◽  
Longitudinal Displacement ◽  
Zirconate Titanate

A Study of Antiferromagnetic-Pinned Multiferroic Composites Nano Read Head

2016 ◽  
Author(s):  
Salinee Choowitsakunlert ◽  
Rardchawadee Silapunt ◽  
Hideki Yokoi
Keyword(s):  
Magnetic Field ◽  
Electric Field ◽  
Lead Zirconate Titanate ◽  
Lead Zirconate ◽  
Piezoelectric Response ◽  
Potential Candidate ◽  
Zirconate Titanate ◽  
Read Head ◽  
Maximum Electric Field

This paper presents a study of the effect of antiferromagnetic (AFM) integration on the nano AFM-pinned multiferroic (MF) composites structure. The nano MF composites structure is a potential candidate for a future magnetic read head. The simulation of the AFM/ferromagnetic (FM) bilayers characteristics and the evaluation of the magnetoelectric (ME) effect induced in the 1-dimensional (1D) L-T mode model of AFM-pinned structure of AFM/FM/Ferroelectric (FE)/FM/AFM are performed. FM, FE, and two types of AFM materials are Terfenol-D, lead zirconate titanate (PZT), and PtMn and Cr2O3, respectively. The magnetoelectric (ME) effect is investigated using the 1D standard square law. Magnetic-field induced strain in the FM layer, piezoelectric response of the PZT layer, and the ME coefficient are determined. Specifically, the influence of AFM on the MF composites structure for various AFM thicknesses is of interest. It is found that the maximum electric field and potential across the PZT layer are achieved at 2.7 nm thick of PtMn. The result is well agreed by associated magnetic field-induced strain and ME coefficient.

scholarly journals Strongly Enhanced Piezoelectric Response in Lead Zirconate Titanate Films with Vertically Aligned Columnar Grains

2017 ◽  
Vol 9 (11) ◽  
pp. 9849-9861 ◽  
Author(s):  
Minh D. Nguyen ◽  
Evert P. Houwman ◽  
Matthijn Dekkers ◽  
Guus Rijnders
Keyword(s):  
Lead Zirconate Titanate ◽  
Lead Zirconate ◽  
Piezoelectric Response ◽  
Zirconate Titanate ◽  
Columnar Grains ◽  
Vertically Aligned

Non-aqueous electrochemical deposition of lead zirconate titanate films for flexible sensor applications

2017 ◽  
Vol 31 (31) ◽  
pp. 1750287
Author(s):  
Sherin Joseph ◽  
A. V. Ramesh Kumar ◽  
Reji John
Keyword(s):  
Electrochemical Deposition ◽  
Lead Zirconate Titanate ◽  
Current Density ◽  
Piezoelectric Materials ◽  
Deposition Process ◽  
Lead Zirconate ◽  
Spectroscopic Studies ◽  
Raman Spectroscopic ◽  
Sensor Applications ◽  
Zirconate Titanate

Lead zirconate titanate (PZT) is one of the most important piezoelectric materials widely used for underwater sensors. However, PZTs are hard and non-compliant and hence there is an overwhelming attention devoted toward making it flexible by preparing films on flexible substrates by different routes. In this work, the electrochemical deposition of composition controlled PZT films over flexible stainless steel (SS) foil substrates using non-aqueous electrolyte dimethyl sulphoxide (DMSO) was carried out. Effects of various key parameters involved in electrochemical deposition process such as current density and time of deposition were studied. It was found that a current density of 25 mA/cm2 for 5 min gave a good film. The morphology and topography evaluation of the films was carried out by scanning electron microscopy (SEM) and atomic force microscopy (AFM), respectively, which showed a uniform morphology with a surface roughness of 2 nm. The PZT phase formation was studied using X-ray diffraction (XRD) and corroborated with Raman spectroscopic studies. The dielectric constant, dielectric loss, hysteresis and I–V characteristics of the film was evaluated.

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