Comparison of TiN Films Deposited Using Tetrakisdimethylaminotitanium and Tetrakisdiethylaminotitanium by the Atomic Layer Deposition Method
2003 ◽
Vol 42
(Part 1, No. 7A)
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pp. 4245-4248
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Keyword(s):
2003 ◽
Vol 42
(Part 2, No. 4B)
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pp. L414-L416
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Keyword(s):
2021 ◽
Vol 224
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pp. 111010
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2007 ◽
pp. 689-692
2007 ◽
Vol 50
(6)
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pp. 1827
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2001 ◽
Vol 40
(Part 1, No. 7)
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pp. 4657-4660
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2015 ◽
Vol 349
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pp. 287-291
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2016 ◽
Vol 34
(1)
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pp. 01A136
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