Extension of Atomic Mixing, Surface Roughness and Information Depth Model for Auger Electron Spectroscopy Sputter-Depth Profile Using Tilted Cylindrical Mirror Analyzer

2003 ◽  
Vol 42 (Part 1, No. 12) ◽  
pp. 7580-7584 ◽  
Author(s):  
Takuya Bungo ◽  
Yuzuru Mizuhara ◽  
Takaharu Nagatomi ◽  
Yoshizo Takai
Keyword(s):  
Surface Roughness ◽  
Auger Electron Spectroscopy ◽  
Depth Profile ◽  
Electron Spectroscopy ◽  
Auger Electron ◽  
Cylindrical Mirror ◽  
Information Depth ◽  
Atomic Mixing

Information depth in Auger electron spectroscopy

1992 ◽  
Vol 275 (1-2) ◽  
pp. 114-120 ◽  
Author(s):  
J. Ferrón ◽  
E.C. Goldberg
Keyword(s):  
Auger Electron Spectroscopy ◽  
Electron Spectroscopy ◽  
Auger Electron ◽  
Information Depth

Auger Electron Emission Micrography and Microanalysis of Solid Surfaces

1973 ◽  
Vol 17 ◽  
pp. 498-508
Author(s):  
K. Hayakawa ◽  
H. Okano ◽  
S. Kawase ◽  
S. Yamamoto
Keyword(s):  
Auger Electron Spectroscopy ◽  
Electron Energy ◽  
Electron Emission ◽  
Electron Spectroscopy ◽  
Electron Probe ◽  
Auger Electron ◽  
Solid Surfaces ◽  
Energy Analyzer ◽  
Cylindrical Mirror ◽  
Spectroscopy Studies

AbstractAn electron probe Auger emission microanalyzer has been constructed. The instrument is composed of an electromagnetic focussing primary probe column and a cylindrical mirror electron energy analyzer. By using this instrument, Auger electron spectroscopy studies have been carried out in the modes of both emission microanalysis and emission micrograph. The feasibility o£ this method is investigated through its application to the study of iron surface.

Sign in / Sign up

Export Citation Format

Share Document