scholarly journals Repeatability of Spectral Intensity Using an Auger Electron Spectroscopy Instrument Equipped with a Cylindrical Mirror Analyzer

2014 ◽  
Vol 20 (3) ◽  
pp. 161-165
Author(s):  
Akira Kurokawa ◽  
Shinya Terauchi ◽  
Mika Ito
Keyword(s):  
Auger Electron Spectroscopy ◽  
Electron Spectroscopy ◽  
Auger Electron ◽  
Spectral Intensity ◽  
Cylindrical Mirror

Auger Electron Emission Micrography and Microanalysis of Solid Surfaces

1973 ◽  
Vol 17 ◽  
pp. 498-508
Author(s):  
K. Hayakawa ◽  
H. Okano ◽  
S. Kawase ◽  
S. Yamamoto
Keyword(s):  
Auger Electron Spectroscopy ◽  
Electron Energy ◽  
Electron Emission ◽  
Electron Spectroscopy ◽  
Electron Probe ◽  
Auger Electron ◽  
Solid Surfaces ◽  
Energy Analyzer ◽  
Cylindrical Mirror ◽  
Spectroscopy Studies

AbstractAn electron probe Auger emission microanalyzer has been constructed. The instrument is composed of an electromagnetic focussing primary probe column and a cylindrical mirror electron energy analyzer. By using this instrument, Auger electron spectroscopy studies have been carried out in the modes of both emission microanalysis and emission micrograph. The feasibility o£ this method is investigated through its application to the study of iron surface.

scholarly journals Energies of Excited States of Doubly Ionized Molecules by Means of Auger Electron Spectroscopy Part I. Electronic States of N22+

1969 ◽  
Vol 24 (11) ◽  
pp. 1728-1733 ◽  
Author(s):  
D. Stalherm ◽  
B. Cleff ◽  
H. Hillig ◽  
W. Mehlhorn
Keyword(s):  
Auger Electron Spectroscopy ◽  
Excited States ◽  
Electron Spectroscopy ◽  
Auger Electron ◽  
Direct Evidence ◽  
Auger Spectrum ◽  
Electronic States ◽  
Auger Process ◽  
Auger Electrons ◽  
Cylindrical Mirror

Abstract A new method, Auger electron spectroscopy, is applied to the study of excited states of doubly ionized molecules. The energies of Auger electrons determine directly the vertical energies of doubly ionized states, because the single Auger process leaves the molecule in a state of double ionization. We have investigated the states of N22+ via the K Auger spectrum of N2. The ionization in the K shell was caused by electron impact. The K Auger electrons, analyzed by means of an electrostatic cylindrical mirror analyzer, gave direct evidence for the following states: x1Σg+, A″ 3Σu+ ,A3 Πg, c1Πg, d1Σu+ and e1Σg+ .Their energies have been measured and are listed below. Also the energy required to ionize N2 twofold in the (σg 2s) orbital has been determined to be (96.5 ± 1.0) eV.

Reference Electron Energy Spectra for Quantitative Auger Electron Spectroscopy (AES) : Cu(100), (110), and (111)

1997 ◽  
Vol 3 (S2) ◽  
pp. 1067-1068
Author(s):  
Keisuke Goto
Keyword(s):  
Auger Electron Spectroscopy ◽  
Electron Energy ◽  
Electron Spectroscopy ◽  
Auger Electron ◽  
Narrow Range ◽  
Primary Electron ◽  
Energy Calibration ◽  
Cylindrical Mirror ◽  
Cosine Law ◽  
Acceleration Voltage

We have developed a novel cylindrical mirror analyzer (CMA) for the quantitative Auger electron spectroscopy (AES) to obtain reference electron spectra. This CMA was defined in all respects, thus it yields an absolute electron energy distribution ; the energy resolution of 0.25% for 42.3° ± 6° of incidence angles (theoretically obtainable resolution), the estimated transmission of 6.2% (assuming cosine law), and the signal detection by the combination of Faraday cup and electrometer (SI traceable). The acceleration voltages for the primary electron beam were ranging 1 through 5000 volts and the energy range of the sweep was 0 through 5000 eV in 0.1 eV(min)/step for the whole range and 10 meV or even 0.1 meV/step for the limited narrow range. The energy calibration by using the primary acceleration voltage (SI traceable) and the spectral intensity correction for the relativity have been performed.The spectra for typical samples have already been published, i.e., C's(soot and graphite), Al(poly), Si(100and 111), Cr(poly), Fe(poly), Ni(poly), Cu(poly), Ga(liquid), Ag(poly), and Au(poly). Among the samples C's and Ga(liquid) seem to be convincing materials.

The formation of low temperature Cu3Si in Ag(Cu)/Si structure upon annealing and its effects on adhesion and resistivity

2003 ◽  
Vol 766 ◽  
Author(s):  
Sungjin Hong ◽  
Seob Lee ◽  
Yeonkyu Ko ◽  
Jaegab Lee
Keyword(s):  
Low Temperature ◽  
Auger Electron Spectroscopy ◽  
Electron Spectroscopy ◽  
Auger Electron ◽  
Si Substrate ◽  
Copper Silicide ◽  
Alloy Films ◽  
Cu Alloy ◽  
Cu Film ◽  
Rapid Drop

AbstractThe annealing of Ag(40 at.% Cu) alloy films deposited on a Si substrate at 200 – 800 oC in vacuum has been conducted to investigate the formation of Cu3Si at the Ag-Si interface and its effects on adhesion and resistivity of Ag(Cu)/Si structure. Auger electron spectroscopy(AES) analysis showed that annealing at 200°C allowed a diffusion of Cu to the Si surface, leading to the significant reduction in Cu concentration in Ag(Cu) film and thus causing a rapid drop in resistivity. In addition, the segregated Cu to the Si surface reacts with Si, forming a continuous copper silicide at the Ag(Cu)/Si interface, which can contribute to an enhanced adhesion of Ag(Cu)/Si annealed at 200 oC. However, as the temperature increases above 300°C, the adhesion tends to decrease, which may be attributed to the agglomeration of copper silicide beginning at around 300°C.

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