Hydroxyl-Radical-Assisted Growth of ZnO Films by Remote Plasma Metal-Organic Chemical Vapor Deposition

2004 ◽  
Vol 43 (11A) ◽  
pp. 7672-7676 ◽  
Author(s):  
Atsushi Nakamura ◽  
Satoshi Shigemori ◽  
Yoshimi Shimizu ◽  
Toru Aoki ◽  
Jiro Temmyo
Keyword(s):  
Chemical Vapor Deposition ◽  
Hydroxyl Radical ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Organic Chemical ◽  
Zno Films ◽  
Remote Plasma ◽  
Metal Organic ◽  
Organic Chemical Vapor Deposition

Remote Plasma Enhanced-Metal Organic Chemical Vapor Deposition of Zirconium Oxide/Silicon Oxide Alloy, (ZrO2)1-(SiO2)1−x (x:≤0.5), Thin Films for Advanced High-K Gate Dielectrics

1999 ◽  
Vol 567 ◽  
Author(s):  
D. Wolfe ◽  
K. Flock ◽  
R. Therrien ◽  
R. Johnson ◽  
B. Rayner ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Silicon Oxide ◽  
Chemical Vapor ◽  
Organic Chemical ◽  
Remote Plasma ◽  
Before And After ◽  
Oxidized Zirconium ◽  
Metal Organic ◽  
Organic Chemical Vapor Deposition

ABSTRACTA remote plasma enhanced-metal organic chemical vapor deposition (RPE-MOCVD) process was developed for the preparation of non-crystalline (ZrO2)x-(SiO2)1−x (x ≤ 0.5) alloys, targeting the compound composition ZrSiO4with k ∼ 12.5. Shifts in Si LVV and Zr LMM AES energies with respect to elemental values showed that the deposited film was a fully-oxidized zirconium/silicon alloy. FTIR results were consistent with AES, and a Zr-O-Si bonding mode was identified in the spectra. The films were amorphous before and after RTA at 900°C for 30 sec, as monitored via RHEED. Optical absorption measurements indicated the onset of band-to-band transitions at an energy of approximately 6 eV. Finally, C-V testing showed that the films were insulating.

Effect of total gas velocity on the growth of ZnO films by metal-organic chemical vapor deposition

2006 ◽  
Vol 514 (1-2) ◽  
pp. 306-309 ◽  
Author(s):  
Junjie Zhu ◽  
Ran Yao ◽  
Cihui Liu ◽  
In-Hwan Lee ◽  
Lala Zhu ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Organic Chemical ◽  
Zno Films ◽  
Gas Velocity ◽  
Metal Organic ◽  
Organic Chemical Vapor Deposition
Sign in / Sign up

Export Citation Format

Share Document