Growth Mechanism of Laser Annealing of Nickel-Induced Lateral Crystallized Silicon Films

2006 ◽  
Vol 45 (1A) ◽  
pp. 21-27 ◽  
Author(s):  
Guo-Ren Hu ◽  
YewChung Sermon Wu ◽  
Chi-Wei Chao ◽  
Hsieh-Chih Shih
Keyword(s):  
Growth Mechanism ◽  
Laser Annealing ◽  
Silicon Films

Microstructure of polycrystalline silicon films obtained by combined furnace and laser annealing

1995 ◽  
Vol 66 (11) ◽  
pp. 1394-1396 ◽  
Author(s):  
R. Carluccio ◽  
J. Stoemenos ◽  
G. Fortunato ◽  
D. B. Meakin ◽  
M. Bianconi
Keyword(s):  
Polycrystalline Silicon ◽  
Laser Annealing ◽  
Silicon Films ◽  
Polycrystalline Silicon Films

Lateral Grain Growth of Amorphous Silicon Films With Wide Thickness Range by Blue Laser Annealing and Application to High Performance Poly-Si TFTs

2016 ◽  
Vol 37 (3) ◽  
pp. 291-294 ◽  
Author(s):  
Seonghyun Jin ◽  
Younwoo Choe ◽  
Suhui Lee ◽  
Tae-Woong Kim ◽  
Mallory Mativenga ◽  
...  
Keyword(s):  
Amorphous Silicon ◽  
Grain Growth ◽  
High Performance ◽  
Laser Annealing ◽  
Blue Laser ◽  
Silicon Films

A study of growth mechanism of microcrystalline thin silicon films deposited at low temperature by SiF4-H2-He PECVD

2004 ◽  
Vol 26 (3) ◽  
pp. 187-192 ◽  
Author(s):  
M. Losurdo ◽  
M. Giangregorio ◽  
A. Grimaldi ◽  
P. Capezzuto ◽  
G. Bruno
Keyword(s):  
Low Temperature ◽  
Growth Mechanism ◽  
Silicon Films ◽  
Thin Silicon

Pulsed Laser Annealing of Thin Silicon Films

2006 ◽  
Vol 45 (4A) ◽  
pp. 2437-2440 ◽  
Author(s):  
Toshiyuki Sameshima ◽  
Hajime Watakabe ◽  
Nobuyuki Andoh ◽  
Seiichiro Higashi
Keyword(s):  
Laser Annealing ◽  
Pulsed Laser ◽  
Silicon Films ◽  
Pulsed Laser Annealing ◽  
Thin Silicon

P-140L:Late-News Poster: Crystallization of Amorphous Silicon Films on Flexible Glass by Blue-Multi-Diode-Laser Annealing as a New LTPS

2012 ◽  
Vol 43 (1) ◽  
pp. 1129-1132 ◽  
Author(s):  
Takashi Noguchi ◽  
Takuma Nishinohara ◽  
Jean de Dieu Mugiraneza ◽  
Katsuya Shirai ◽  
Tatsuya Okada ◽  
...  
Keyword(s):  
Amorphous Silicon ◽  
Diode Laser ◽  
Laser Annealing ◽  
Silicon Films

Lateral Solid-Phase Recrystallization from the Crystal Seed Selectively Formed by Excimer Laser Annealing in Ge-Ion-Implanted Amorphous Silicon Films

2000 ◽  
Vol 39 (Part 1, No. 9A) ◽  
pp. 5063-5068 ◽  
Author(s):  
Jin-Wook Seo ◽  
Satoru Akiyama ◽  
Yoichiro Aya ◽  
Tomoyuki Nohda ◽  
Hiroki Hamada ◽  
...  
Keyword(s):  
Amorphous Silicon ◽  
Excimer Laser ◽  
Laser Annealing ◽  
Solid Phase ◽  
Silicon Films ◽  
Excimer Laser Annealing ◽  
Phase Recrystallization ◽  
Crystal Seed ◽  
Ion Implanted
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