Finding Growth Regions for Carbon Nanofibers and Tubes under Different Growth Conditions Using Simplified Hot-Filament Chemical Vapor Deposition

2006 ◽  
Vol 45 (8A) ◽  
pp. 6517-6523 ◽  
Author(s):  
Naoki Koizumi ◽  
Yusuke Minorikawa ◽  
Hiroyuki Yakabe ◽  
Hideki Kimura ◽  
Tateki Kurosu ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Carbon Nanofibers ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Growth Conditions ◽  
Hot Filament

Epitaxial growth of β–SiC on silicon by bias-assisted hot filament chemical vapor deposition from solid graphite and silicon sources

1998 ◽  
Vol 13 (7) ◽  
pp. 1738-1740 ◽  
Author(s):  
H. K. Woo ◽  
C. S. Lee ◽  
I. Bello ◽  
S. T. Lee
Keyword(s):  
Chemical Vapor Deposition ◽  
Epitaxial Growth ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Growth Conditions ◽  
Graphite Plate ◽  
Key Factor ◽  
Hot Filament ◽  
Silicon Sources ◽  
Sic Film

Epitaxial β–SiC film has been grown on a mirror-polished Si(111) substrate using bias-assisted hot filament chemical vapor deposition (BA-HFCVD) at a substrate temperature of 1000 °C. A graphite plate was used as the only carbon source, and hydrogen was the only feeding gas to the deposition system. Atomic hydrogen, produced by hot filaments, reacted with the graphite to form hydrocarbon radicals which further reacted with the silicon substrate and deposited as β–SiC. The effect of negatively biasing the substrate is the key factor for epitaxial growth. Under the same growth conditions without negative bias, polycrystalline β–SiC resulted.

Growth and characterization of carbon nanofibers by a technique of polymer doped catalyst and hot-filament chemical vapor deposition

Vacuum ◽  
2008 ◽  
Vol 83 (2) ◽  
pp. 273-275
Author(s):  
H.J. Ceragioli ◽  
A.C. Peterlevitz ◽  
J.C.R. Quispe ◽  
V. Baranauskas
Keyword(s):  
Chemical Vapor Deposition ◽  
Carbon Nanofibers ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Hot Filament

Field emission from aligned carbon nanofibers grown in situ by hot filament chemical vapor deposition

2003 ◽  
Vol 82 (15) ◽  
pp. 2515-2517 ◽  
Author(s):  
Chia-Fu Chen ◽  
Chien-Liang Lin ◽  
Chi-Ming Wang
Keyword(s):  
Chemical Vapor Deposition ◽  
Carbon Nanofibers ◽  
Field Emission ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Hot Filament

Microstructure of Carbon Film Deposited Using Hot-Filament Chemical Vapor Deposition

2015 ◽  
Vol 48 (6) ◽  
pp. 104-109
Author(s):  
Youn-Joon Baik ◽  
Do-Hyun Kwon ◽  
Jong-Keuk Park ◽  
Wook-Seong Lee
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Carbon Film ◽  
Chemical Vapor ◽  
Hot Filament

scholarly journals Unusual Dependence of the Diamond Growth Rate on the Methane Concentration in the Hot Filament Chemical Vapor Deposition Process

Materials ◽  
2021 ◽  
Vol 14 (2) ◽  
pp. 426
Author(s):  
Byeong-Kwan Song ◽  
Hwan-Young Kim ◽  
Kun-Su Kim ◽  
Jeong-Woo Yang ◽  
Nong-Moon Hwang
Keyword(s):  
Growth Rate ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Methane Concentration ◽  
Chemical Vapor ◽  
Diamond Growth ◽  
Lower Growth ◽  
Filament Temperature ◽  
Diamond Phase ◽  
Hot Filament

Although the growth rate of diamond increased with increasing methane concentration at the filament temperature of 2100 °C during a hot filament chemical vapor deposition (HFCVD), it decreased with increasing methane concentration from 1% CH4 –99% H2 to 3% CH4 –97% H2 at 1900 °C. We investigated this unusual dependence of the growth rate on the methane concentration, which might give insight into the growth mechanism of a diamond. One possibility would be that the high methane concentration increases the non-diamond phase, which is then etched faster by atomic hydrogen, resulting in a decrease in the growth rate with increasing methane concentration. At 3% CH4 –97% H2, the graphite was coated on the hot filament both at 1900 °C and 2100 °C. The graphite coating on the filament decreased the number of electrons emitted from the hot filament. The electron emission at 3% CH4 –97% H2 was 13 times less than that at 1% CH4 –99% H2 at the filament temperature of 1900 °C. The lower number of electrons at 3% CH4 –97% H2 was attributed to the formation of the non-diamond phase, which etched faster than diamond, resulting in a lower growth rate.

Trifunctional Electrocatalytic Activities of Nitrogen‐Doped Graphitic Carbon Nanofibers Synthesized by Chemical Vapor Deposition

2021 ◽  
Vol 6 (20) ◽  
pp. 4867-4873
Author(s):  
Bhagyashri Todankar ◽  
Pradeep Desai ◽  
Ajinkya K. Ranade ◽  
Tharangattu N. Narayanan ◽  
Masaki Tanemura ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Carbon Nanofibers ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Graphitic Carbon ◽  
Nitrogen Doped ◽  
Graphitic Carbon Nanofibers

A soft X-ray absorption study of nanodiamond films prepared by hot-filament chemical vapor deposition

2003 ◽  
Vol 372 (3-4) ◽  
pp. 320-324 ◽  
Author(s):  
Y.H Tang ◽  
X.T Zhou ◽  
Y.F Hu ◽  
C.S Lee ◽  
S.T Lee ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Absorption Study ◽  
X Ray ◽  
Hot Filament ◽  
X Ray Absorption
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