Comparative Study on Chemical Vapor Deposition of Diamond-Like Carbon Films from Methane and Acetylene Using RF Plasma
2006 ◽
Vol 45
(10B)
◽
pp. 8398-8400
◽
Keyword(s):
2010 ◽
Vol 19
(7-9)
◽
pp. 783-786
◽
Keyword(s):
Keyword(s):
Keyword(s):
2010 ◽
Vol 42
(12-13)
◽
pp. 1702-1705
◽
Keyword(s):
2013 ◽
Vol 52
(11R)
◽
pp. 110123
◽
Keyword(s):
Keyword(s):
2013 ◽
Vol 264
◽
pp. 625-632
◽
Keyword(s):