Wet Chemical Etching Behavior Investigation for CMOS Shallow Trench Isolation (STI) Shape Control
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1991 ◽
Vol 30
(Part 1, No. 11A)
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pp. 2693-2699
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2008 ◽
Vol 5
(9)
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pp. 3116-3118
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2015 ◽
Vol 48
(36)
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pp. 365303
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