Measurement of Trace Metallic Contaminants on Silicon Wafer Surfaces in Native and Dielectric Silicon Oxides by Vapor Phase Decomposition Flow Injection Inductively Coupled Plasma‐Mass Spectrometry

1993 ◽  
Vol 140 (4) ◽  
pp. 1105-1109 ◽  
Author(s):  
János Fucskó ◽  
Samantha S. Tan ◽  
Marjorie K. Balazs
Keyword(s):  
Mass Spectrometry ◽  
Vapor Phase ◽  
Flow Injection ◽  
Inductively Coupled Plasma ◽  
Phase Decomposition ◽  
Silicon Oxides ◽  
Inductively Coupled ◽  
Plasma Mass Spectrometry ◽  
Metallic Contaminants ◽  
Wafer Surfaces

On-Line Trace Enrichment and Determination of Uranium in Waters by Flow Injection Inductively Coupled Plasma Mass Spectrometry

1994 ◽  
Vol 48 (11) ◽  
pp. 1331-1336 ◽  
Author(s):  
Shayessteh Dadfarnia ◽  
Cameron W. McLeod
Keyword(s):  
Mass Spectrometry ◽  
Flow Injection ◽  
Inductively Coupled Plasma ◽  
Sea Water ◽  
Trace Enrichment ◽  
Inductively Coupled ◽  
Plasma Mass Spectrometry ◽  
On Line ◽  
Line Trace

A flow injection system incorporating a microcolumn of activated alumina was combined with inductively coupled plasma mass spectrometry for on-line trace enrichment and determination of uranium in surface waters and sea water. Deposition of uranium was effected with the use of a basic alumina microcolumn, and injection of nitric acid (250 μL, 2M) served to elute retained species to the ICP. A sample volume of 14 mL resulted in a preconcentration factor of 40, and precision at the 50-ng 1−1 level was 4.5% (RSD). The procedure was applied to mineral waters, river water, and sea water, and accuracy was assessed through either analysis of certified reference waters or recovery experiments.

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