Atmospheric Pressure Chemical Vapor Deposition of Copper Thin Films: I . Horizontal Hot Wall Reactor

1991 ◽  
Vol 138 (11) ◽  
pp. 3499-3504 ◽  
Author(s):  
W. G. Lai ◽  
Y. Xie ◽  
G. L. Griffin
2004 ◽  
Vol 16 (6) ◽  
pp. 1120-1125 ◽  
Author(s):  
Christopher S. Blackman ◽  
Claire J. Carmalt ◽  
Shane A. O'Neill ◽  
Ivan P. Parkin ◽  
Leonardo Apostolico ◽  
...  

2013 ◽  
Vol 1 (39) ◽  
pp. 6188 ◽  
Author(s):  
Erik R. Klobukowski ◽  
Wyatt E. Tenhaeff ◽  
James W. McCamy ◽  
Caroline S. Harris ◽  
Chaitanya K. Narula

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