Deposition Process of Amorphous Boron Carbide from CH[sub 4]∕BCl[sub 3]∕H[sub 2] Precursor
2006 ◽
Vol 153
(12)
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pp. C795
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2002 ◽
Vol 407
(1-2)
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pp. 126-131
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Keyword(s):
2009 ◽
Vol 35
(5)
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pp. 1877-1882
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Keyword(s):
2020 ◽
Vol 173
◽
pp. 109397
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Keyword(s):
2013 ◽
Vol 285
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pp. 545-551
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Keyword(s):
2015 ◽
Vol 202
◽
pp. 25-30
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2018 ◽
Vol 44
(14)
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pp. 17298-17304
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Keyword(s):