Thin Film Analysis and Model Interface Characterization Studies of Relevance to Microelectronics

2019 ◽  
Vol 10 (1) ◽  
pp. 65-74
Author(s):  
Ioannis Dontas ◽  
Vasiliki Papaefthimiou ◽  
Styliani Kennou ◽  
Spyridon Ladas
Keyword(s):  
Thin Film ◽  
Film Analysis ◽  
Interface Characterization ◽  
Thin Film Analysis ◽  
Characterization Studies

Acquisition of Surface/Thin Film Analysis System

2002 ◽  
Author(s):  
James Stoffer ◽  
George D. Weddill ◽  
Thomas O'Keefe ◽  
Richard Brow ◽  
Matt O'Keefe
Keyword(s):  
Thin Film ◽  
Film Analysis ◽  
Thin Film Analysis ◽  
Analysis System

Depth microscopy for thin film analysis

1993 ◽  
Vol 334 (1) ◽  
pp. 187-190 ◽  
Author(s):  
G. Dollinger ◽  
M. Boulouednine ◽  
T. Faestermann ◽  
P. Maier-Komor
Keyword(s):  
Thin Film ◽  
Film Analysis ◽  
Thin Film Analysis

Applications of microfocussed ion beams in surface and thin film analysis

Vacuum ◽  
1987 ◽  
Vol 37 (3-4) ◽  
pp. 289-291 ◽  
Author(s):  
RE Thurstans ◽  
J Wolstenholme
Keyword(s):  
Thin Film ◽  
Ion Beams ◽  
Film Analysis ◽  
Thin Film Analysis

MULTILAYER THIN‐FILM ANALYSIS BY ION BACKSCATTERING

1971 ◽  
Vol 18 (5) ◽  
pp. 191-194 ◽  
Author(s):  
S. T. Picraux ◽  
F. L. Vook
Keyword(s):  
Thin Film ◽  
Multilayer Thin Film ◽  
Film Analysis ◽  
Thin Film Analysis ◽  
Ion Backscattering

Significance of the channeling surface peak in thin‐film analysis

1978 ◽  
Vol 32 (2) ◽  
pp. 93-94 ◽  
Author(s):  
Robert L. Kauffman ◽  
L. C. Feldman ◽  
P. J. Silverman ◽  
R. A. Zuhr
Keyword(s):  
Thin Film ◽  
Film Analysis ◽  
Thin Film Analysis
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