Effect of Sr–Ruthenate Seed Layer on Dielectric Properties of SrTiO[sub 3] Thin Films Prepared by Plasma-Enhanced Atomic Layer Deposition

2008 ◽  
Vol 155 (10) ◽  
pp. G185 ◽  
Author(s):  
Ji-Hoon Ahn ◽  
Sang-Won Kang ◽  
Ja-Yong Kim ◽  
Jin-Hyock Kim ◽  
Jae-Sung Roh
Keyword(s):  
Thin Films ◽  
Dielectric Properties ◽  
Atomic Layer Deposition ◽  
Seed Layer ◽  
Atomic Layer ◽  
Layer Deposition

Atomic layer deposition of ruthenium (Ru) thin films using ethylbenzen-cyclohexadiene Ru(0) as a seed layer for copper metallization

2013 ◽  
Vol 546 ◽  
pp. 2-8 ◽  
Author(s):  
Seungmin Yeo ◽  
Sang-Hyeok Choi ◽  
Ji-Yoon Park ◽  
Soo-Hyun Kim ◽  
Taehoon Cheon ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Seed Layer ◽  
Atomic Layer ◽  
Copper Metallization ◽  
Layer Deposition

scholarly journals Seed‐Layer‐Free Atomic Layer Deposition of Highly Uniform Al 2 O 3 Thin Films onto Monolayer Epitaxial Graphene on Silicon Carbide

2019 ◽  
Vol 6 (10) ◽  
pp. 1900097 ◽  
Author(s):  
Emanuela Schilirò ◽  
Raffaella Lo Nigro ◽  
Fabrizio Roccaforte ◽  
Ioannis Deretzis ◽  
Antonino La Magna ◽  
...  
Keyword(s):  
Thin Films ◽  
Silicon Carbide ◽  
Atomic Layer Deposition ◽  
Seed Layer ◽  
Atomic Layer ◽  
Epitaxial Graphene ◽  
Layer Deposition ◽  
Highly Uniform ◽  
Seed Layer Free

Dielectric Properties of SrTiO3 Thin Films on SrRuO3 Seed Prepared by Plasma-enhanced Atomic Layer Deposition

2019 ◽  
Vol 16 (5) ◽  
pp. 335-339 ◽  
Author(s):  
Jihoon Ahn ◽  
Ja-Yong Kim ◽  
Jin-Hyock Kim ◽  
Jae-Sung Roh ◽  
Sang-Won Kang
Keyword(s):  
Thin Films ◽  
Dielectric Properties ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Layer Deposition

Improved dielectric properties of BeO thin films grown by plasma enhanced atomic layer deposition

2020 ◽  
Vol 163 ◽  
pp. 107661
Author(s):  
Yoonseo Jang ◽  
Seung Min Lee ◽  
Do Hwan Jung ◽  
Jung Hwan Yum ◽  
Eric S. Larsen ◽  
...  
Keyword(s):  
Thin Films ◽  
Dielectric Properties ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Layer Deposition
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