Influences of a Crystalline Seed Layer during Atomic Layer Deposition of SrTiO[sub 3] Thin Films Using Ti(O-iPr)[sub 2](thd)[sub 2], Sr(thd)[sub 2], and H[sub 2]O
2008 ◽
Vol 155
(11)
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pp. G253
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2019 ◽
Vol 6
(10)
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pp. 1900097
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2008 ◽
Vol 155
(10)
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pp. G185
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Keyword(s):
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2015 ◽
Vol 764-765
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pp. 138-142
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