The wet chemical treatment of monocrystalline silicon wafers, said method comprising texturing, represents one of the fundamental steps of manufacturing techniques of high-efficiency solar cells. As part of this work, methods for texturing single-crystal silicon wafers for solar cells were studied.As a result of studies, the optimal parameters of texturing technology for the studied samples were determined. The main type of etchant for texturing processes, which is a solution of KOH with isopropanol, is also determined.
AbstractThis paper reports on the study of the gettering of nickel contamination in hydrogen annealed CZ-silicon wafers by using method of wet chemical analysis. According to the wet chemical analysis, we believe that the hydrogen annealed wafer is of high quality in the region beneath the surface (DZ) and has a higher gettering ability for nickel compared with conventional CZ wafers. This observation is also in agreement with our MOS C-t measurements.
Проблемы при использовании травителя KOH-IPA для текстурирования кремниевых пластин