scholarly journals Electrochemical Investigation of the Effect of Hydrogen Peroxide Concentration on Platinum-Particle-Assisted Etching of p-Type Silicon in a Hydrofluoric Acid Solution

2021 ◽  
Author(s):  
Ayumu Matsumoto ◽  
Kyohei Furukawa ◽  
Shun Majima ◽  
Keishi Iwamoto ◽  
Shinji Yae
Keyword(s):  
Hydrogen Peroxide ◽  
Acid Solution ◽  
Hydrofluoric Acid ◽  
Platinum Particle ◽  
Hydrofluoric Acid Solution ◽  
Electrochemical Investigation ◽  
Type Silicon ◽  
P Type

scholarly journals Palladium Enhanced Etching of n-type Silicon in Hydrofluoric Acid Solution

2008 ◽  
Vol 76 (2) ◽  
pp. 144-146 ◽  
Author(s):  
Shinji YAE ◽  
Makoto ABE ◽  
Naoki FUKUMURO ◽  
Hitoshi MATSUDA
Keyword(s):  
Acid Solution ◽  
Hydrofluoric Acid ◽  
Hydrofluoric Acid Solution ◽  
Type Silicon
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