Application of Neural Network-Based Oxide Deposition Models to CMP Modeling

2019 ◽  
Vol 8 (5) ◽  
pp. P3154-P3162 ◽  
Author(s):  
Ruben Ghulghazaryan ◽  
Davit Piliposyan ◽  
Jeff Wilson
2000 ◽  
Vol 25 (4) ◽  
pp. 325-325
Author(s):  
J.L.N. Roodenburg ◽  
H.J. Van Staveren ◽  
N.L.P. Van Veen ◽  
O.C. Speelman ◽  
J.M. Nauta ◽  
...  

2004 ◽  
Vol 171 (4S) ◽  
pp. 502-503
Author(s):  
Mohamed A. Gomha ◽  
Khaled Z. Sheir ◽  
Saeed Showky ◽  
Khaled Madbouly ◽  
Emad Elsobky ◽  
...  

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