scholarly journals Correlating Coefficient of Friction and Shear Force to Platen Motor Current in Tungsten and Interlayer Dielectric Chemical Mechanical Planarization at Highly Non-Steady-State Conditions

2019 ◽  
Vol 8 (10) ◽  
pp. P634-P645 ◽  
Author(s):  
R. Headley ◽  
C. Frank ◽  
Y. Sampurno ◽  
A. Philipossian
Keyword(s):  
Steady State ◽  
Coefficient Of Friction ◽  
Shear Force ◽  
Chemical Mechanical Planarization ◽  
Interlayer Dielectric ◽  
Motor Current

Metrological Assessment of the Coefficient of Friction of Various Types of Silica Using the Motor Current During ILD-CMP

2004 ◽  
Vol 816 ◽  
Author(s):  
Harald Jacobsen ◽  
Eric Stachowiak ◽  
Gerfried Zwicker ◽  
Wolfgang Lortz ◽  
Ralph Brandes
Keyword(s):  
Shear Rate ◽  
Film Thickness ◽  
Coefficient Of Friction ◽  
Removal Rate ◽  
Rate Range ◽  
Systematic Assessment ◽  
Parameter Domain ◽  
Motor Current ◽  
First Approximation ◽  
The Coefficient Of Friction

AbstractIn the work presented the coefficient of friction (COF) was firstly determined metrologically by a systematic assessment of motor currents for different products of pressure and velocity (p v). With all seven test slurries it could be shown that the inserted energy ECMP is proportional to the product of pressure and velocity. The COF of the parameter domain considered here does not depend on the inserted energy or the product of p v in a first approximation. For all tested slurries it was demonstrated that, both the COF and the removal rate (RR) behave analogously (low COF→ low RR).Measurements of the viscosity η have shown that η is not a constant in the shear rate range relevant for CMP. Using the obtained viscosity values a mean slurry film thickness in the range of 2,5 -C 6 μm could be calculated.

scholarly journals Fault Detection (Condition Monitoring) of Induction Motor based on Wavelet Transform

2013 ◽  
pp. 268-271
Author(s):  
U. E. Hiwase ◽  
S. B. Warkad
Keyword(s):  
Wavelet Transform ◽  
Steady State ◽  
Fault Detection ◽  
Induction Motor ◽  
Condition Monitoring ◽  
Discrete Wavelet ◽  
Steady State Analysis ◽  
Motor Current ◽  
Current Signatures ◽  
Vector Approach

Presently, many condition monitoring techniques that are based on steady-state analysis are being applied to Induction motor. However, the operation of induction motor is predominantly transient, therefore prompting the development of non-stationary techniques for fault detection. In this paper we apply steady-state techniques e.g. Motor Current Signatures Analysis (MCSA) and the Extended Park’s Vector Approach (EPVA), as well as a new transient technique that is a combination of the EPVA, the Discrete Wavelet Transform and statistics, to the detection of turn faults in a induction motor. It will be shown that steady-state techniques are not effective when applied to induction motor operating under transient.

Effect of Pad Surface Micro-Texture on Removal Rate during Interlayer Dielectric Chemical Mechanical Planarization Process

2013 ◽  
Vol 52 (1R) ◽  
pp. 018001 ◽  
Author(s):  
Xiaoyan Liao ◽  
Yun Zhuang ◽  
Leonard J. Borucki ◽  
Jiang Cheng ◽  
Siannie Theng ◽  
...  
Keyword(s):  
Removal Rate ◽  
Chemical Mechanical Planarization ◽  
Interlayer Dielectric ◽  
Planarization Process
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