Chemical Mechanical Polishing of Ge in Hydrogen Peroxide-Based Silica Slurries: Role of Ionic Strength
2011 ◽
Vol 158
(11)
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pp. H1152
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Keyword(s):
2014 ◽
Vol 445
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pp. 119-127
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2010 ◽
Vol 13
(5)
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pp. H155
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1999 ◽
Vol 3
(5)
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pp. 232
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2005 ◽
Vol 152
(12)
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pp. G912
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Keyword(s):
2010 ◽
Vol 366
(1-3)
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pp. 68-73
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Keyword(s):
2003 ◽
Vol 214
(1-4)
◽
pp. 120-135
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2004 ◽
Vol 87
(2-3)
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pp. 387-393
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