Characteristics of Zinc Oxide Films Grown on Sapphire Substrates Using High-Energy H2O Generated by a Catalytic Reaction on Platinum Nanoparticles

2012 ◽  
Keyword(s):  
Zinc Oxide ◽  
Catalytic Reaction ◽  
Platinum Nanoparticles ◽  
Oxide Films ◽  
High Energy ◽  
Sapphire Substrates ◽  
Zinc Oxide Films

On the Characteristics of Zinc Oxide Films Grown on (11-20) Sapphire Substrates by Atomic Layer Deposition Using Diethylzinc and Nitrous Oxide

2019 ◽  
Vol 19 (2) ◽  
pp. 843-853 ◽  
Author(s):  
Kuo-Yi Yen ◽  
Kuang-Pi Liu ◽  
Yen-Ting Lin ◽  
Jyh-Rong Gong ◽  
Kuen-Yau Tsai ◽  
...  
Keyword(s):  
Zinc Oxide ◽  
Nitrous Oxide ◽  
Atomic Layer Deposition ◽  
Oxide Films ◽  
Atomic Layer ◽  
Sapphire Substrates ◽  
Zinc Oxide Films ◽  
Layer Deposition

Analysis of Sputtered Zinc Oxide Films

1980 ◽  
Vol 38 ◽  
pp. 416-417
Author(s):  
T. A. Emma ◽  
M. P. Singh
Keyword(s):  
Electron Microscopy ◽  
Zinc Oxide ◽  
Piezoelectric Materials ◽  
Oxide Films ◽  
Optical Quality ◽  
Zno Films ◽  
Rf Power ◽  
X Ray Diffraction ◽  
Sputtered Films ◽  
Zinc Oxide Films

Optical quality zinc oxide films have been characterized using reflection electron diffraction (RED), replication electron microscopy (REM), scanning electron microscopy (SEM), and X-ray diffraction (XRD). Significant microstructural differences were observed between rf sputtered films and planar magnetron rf sputtered films. Piezoelectric materials have been attractive for applications to integrated optics since they provide an active medium for signal processing. Among the desirable physical characteristics of sputtered ZnO films used for this and related applications are a highly preferred crystallographic texture and relatively smooth surfaces. It has been found that these characteristics are very sensitive to the type and condition of the substrate and to the several sputtering parameters: target, rf power, gas composition and substrate temperature.

Properties of Transparent Conductive Zinc Oxide Films Deposited on COP Substrates by PLD Method

2009 ◽  
Vol 129 (11) ◽  
pp. 1981-1984
Author(s):  
Yuki Ueno ◽  
Takanori Aoki ◽  
Akio Suzuki ◽  
Tatsuhiko Matsushita ◽  
Masahiro Okuda
Keyword(s):  
Zinc Oxide ◽  
Oxide Films ◽  
Zinc Oxide Films
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