Evaluation of the Near-Zero Temperature Coefficient of Resistivity (NZ-TCR) of ALD TiSixn Films
2001 ◽
Vol 120
(7-8)
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pp. 307-310
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2020 ◽
Vol 38
(6)
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pp. 062404
2016 ◽
Vol 663
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pp. 94-99
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