Vapor-Phase Molecular Layer Deposition of Self-Assembled Multilayers for Organic Thin-Film Transistor

Author(s):  
Byoung H. Lee
Author(s):  
Seung-Hwan Lee ◽  
Hyun-Jun Jeong ◽  
Ki-Lim Han ◽  
GeonHo Beak ◽  
Jin-Seong Park

Indium oxide and indicone hybrid films consisting of indium oxide and organic aromatic linker are grown by molecular layer deposition (MLD) using bis(trimethylsilyl)amido-diethyl Indium (INCA-1) as the indium precursor, hydrogen...


2015 ◽  
Vol 3 (40) ◽  
pp. 10349-10361 ◽  
Author(s):  
J.-P. Niemelä ◽  
A. J. Karttunen ◽  
M. Karppinen

Nanoscale layer-engineering using the combined atomic/molecular layer deposition (ALD/MLD) technique for the fabrication of oxide–organic thin-film superlattices is an attractive way to tailor the performance of thermoelectric materials as it potentially allows us to suppress thermal conductivity without significantly hindering the electrical transport properties.


2006 ◽  
Vol 88 (7) ◽  
pp. 073505 ◽  
Author(s):  
M. McDowell ◽  
I. G. Hill ◽  
J. E. McDermott ◽  
S. L. Bernasek ◽  
J. Schwartz

2020 ◽  
Vol 49 (32) ◽  
pp. 11310-11316
Author(s):  
Aida Khayyami ◽  
Anish Philip ◽  
Jenna Multia ◽  
Maarit Karppinen

We demonstrate the fabrication of in-situ crystalline thin films of various azobenzene (AZO) based photoresponsive metal–organic structures using the atomic/molecular layer deposition (ALD/MLD) technique.


Sign in / Sign up

Export Citation Format

Share Document