Fabrication and characterization of vibration-driven AlN piezoelectric micropower generator compatible with complementary metal-oxide semiconductor process
2014 ◽
Vol 26
(15)
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pp. 1971-1979
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2015 ◽
Vol 32
(12)
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pp. 127101
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2007 ◽
Vol 46
(1)
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pp. 51-55
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2017 ◽
Vol 9
(15)
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pp. 13262-13268
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2008 ◽
Vol 47
(2)
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pp. 1147-1151
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