Influence of ZnO buffer layer thickness on electrical and optical properties of GZO thin films deposited on polymer substrates

2007 ◽  
Vol 23 (3) ◽  
pp. 303-306 ◽  
Author(s):  
S. Kim ◽  
W. Lee ◽  
C. Lee
2004 ◽  
Vol 262 (1-4) ◽  
pp. 456-460 ◽  
Author(s):  
Yuantao Zhang ◽  
Guotong Du ◽  
Boyang Liu ◽  
HuiChao Zhu ◽  
Tianpeng Yang ◽  
...  

2006 ◽  
Vol 252 (8) ◽  
pp. 2888-2893 ◽  
Author(s):  
Ruijin Hong ◽  
Jianda Shao ◽  
Hongbo He ◽  
Zhengxiu Fan

2011 ◽  
Vol 61 (4) ◽  
pp. 458-464
Author(s):  
Chang Hoi KIM ◽  
Ju-Young LEE ◽  
Bo Ra JANG ◽  
Jong Hoon LEE ◽  
Hong Seung KIM*

1994 ◽  
Vol 339 ◽  
Author(s):  
T. J. Kistenmacher ◽  
S. A. Ecelberger ◽  
W. A. Bryden

ABSTRACTIntroduction of a buffer layer to facilitate heteroepitaxy in thin films of the Group IIIA nitrides has had a tremendous impact on growth morphology and electrical transport. While AIN- and self-seeded growth of GaN has captured the majority of attention, the use of AIN-buffered substrates for InN thin films has also had considerable success. Herein, the properties of InN thin films grown by reactive magnetron sputtering on AIN-buffered (00.1) sapphire and (111) silicon are presented and, in particular, the evolution of the structural and electrical transport properties as a function of buffer layer sputter time (corresponding to thicknesses from ∼50Å to ∼0.64 μm) described. Pertinent results include: (a) for the InN overlayer, structural coherence and homogeneous strain normal to the (00.1) growth plane are highly dependent on the thickness of the AIN-buffer layer; (b) the homogeneous strain in the AIN-buffer layer is virtually nonexistent from a thickness of 200Å (where a significant X-ray intensity for (00.2)AIN is observed); and (c) the n-type electrical mobility for films on AIN-nucleated (00.1) sapphire is independent of AIN-buffer layer thickness, owing to divergent variations in carrier concentration and film resistivity. These effects are in the main interpreted as arising from a competition between the lattice mismatch of the InN overlayer with the substrate and with the AIN-buffer layer.


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