Thickness dependent properties of diamond-like carbon coatings by filtered cathodic vacuum arc deposition

AbstractIn this study, silicon (Si) was doped on a tetrahedral amorphous carbon (ta-C) coating and the tribological characteristics of the resulting Si-doped diamond-like carbon (DLC; a-C:Si:H) were investigated against a SUJ2 ball. The Si fraction in the coating was varied from 0 to ~ 20 at.% by increasing the trimethylsilane gas flow rate during filtered cathodic vacuum arc deposition. The coefficient of friction (CoF) showed no obvious change when the Si fraction was less than ~ 7 at.%. However, after Si doping, it significantly decreased when the Si fraction was greater than ~ 8 at.%. The running-in period also decreased to less than 1000 cycles after Si doping. The rapid formation of Si-rich debris and transfer layer led to the fabrication of a low-friction tribofilm, which was induced by the tribochemical reaction with moisture under ambient conditions. When the Si fraction was ~ 17 at.%, the lowest CoF of less than 0.05 was obtained. Further Si doping beyond the critical point led to the destruction of the film because of reduced hardness.

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Preliminary study of the mechanical and tribological properties of diamond-like carbon films prepared on steel substrates by filtered cathodic vacuum arc deposition

Boundary and Mixed Lubrication - Science and Applications, Proceedings of the 28th Leeds-Lyon Symposium on Tribology - Tribology Series ◽

10.1016/s0167-8922(02)80030-x ◽

2002 ◽

pp. 265-269

Author(s):

P.W. Shum ◽

K.Y. Li ◽

Z.F. Zhou

Keyword(s):

Tribological Properties ◽

Carbon Films ◽

Vacuum Arc ◽

Diamond Like Carbon ◽

Mechanical And Tribological Properties ◽

Vacuum Arc Deposition ◽

Preliminary Study ◽

Filtered Cathodic Vacuum Arc ◽

Steel Substrates ◽

Arc Deposition

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A rectilinear plasma filtering system for vacuum-arc deposition of diamond-like carbon coatings

Diamond and Related Materials ◽

10.1016/s0925-9635(98)00402-6 ◽

1999 ◽

Vol 8 (2-5) ◽

pp. 468-471 ◽

Cited By ~ 13

Author(s):

I.I. Aksenov ◽

V.A. Belous ◽

V.V. Vasil'ev ◽

Yu.Ya. Volkov ◽

V.E. Strel'nitskij

Keyword(s):

Vacuum Arc ◽

Diamond Like Carbon ◽

Carbon Coatings ◽

Vacuum Arc Deposition ◽

Arc Deposition

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Characterization of diamond-like carbon coatings prepared by pulsed bias cathodic vacuum arc deposition

Thin Solid Films ◽

10.1016/j.tsf.2007.06.134 ◽

2007 ◽

Vol 516 (2-4) ◽

pp. 243-247 ◽

Cited By ~ 23

Author(s):

Jin-Bao Wu ◽

Jia-Jen Chang ◽

Mei-Yi Li ◽

Ming-Sheng Leu ◽

Ai-Kang Li

Keyword(s):

Vacuum Arc ◽

Diamond Like Carbon ◽

Carbon Coatings ◽

Vacuum Arc Deposition ◽

Arc Deposition

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Deposition of Diamond-Like Carbon Films on Polyoxymethylene Substrates by Magnetic Filtered Cathodic Vacuum Arc Deposition

Advanced Materials Research ◽

10.4028/www.scientific.net/amr.47-50.1415 ◽

2008 ◽

Vol 47-50 ◽

pp. 1415-1418

Author(s):

Lan Xin Xu ◽

Peng Li ◽

Jin Wang ◽

Yong Xiang Leng ◽

Hong Sun ◽

...

Keyword(s):

Photoelectron Spectroscopy ◽

Carbon Films ◽

Vacuum Arc ◽

Diamond Like Carbon ◽

Dlc Film ◽

Vacuum Arc Deposition ◽

Filtered Cathodic Vacuum Arc ◽

Arc Deposition ◽

Ball On Disc

In order to improve the abrasion property of polyoxymethylene (POM)，diamond like carbon (DLC) film was deposited on POM substrate by the method of magnetic filtered cathodic vacuum arc deposition (MFCVAD). X-ray photoelectron spectroscopy (XPS) showed that the sp3 fraction decreased with the negative bias voltages increased. According to the result of the nano-indenter, the hardness of POM plates coated with DLC films was significantly harder than POM substrate. The results of ball-on-disc tribological testing demonstrated that the hardest DLC film had the lowest friction coefficient (0.11). The evaluation of in vitro platelet adhesion test indicates that the numbers of adhered and activated platelet on the DLC film deposited under the condition of 0V and 9min were remarkably decreased compared with that of the untreated POM.

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