Numerical and Experimental Study of Residual Stress of Multilayer Diamond-Like Carbon Films Prepared by Filtered Cathodic Vacuum Arc Deposition
2012 ◽
Vol 40
(9)
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pp. 2261-2266
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2008 ◽
Vol 47-50
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pp. 1415-1418
2000 ◽
Vol 9
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pp. 663-667
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2007 ◽
Vol 16
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pp. 1353-1360
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Vol 28
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pp. 2124-2131
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2016 ◽
Vol 31
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pp. 3161-3167
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1999 ◽
Vol 17
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pp. 3077-3080
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