scholarly journals Novel Diamond Films Synthesis Strategy: Methanol and Argon Atmosphere by Microwave Plasma CVD Method Without Hydrogen

2016 ◽  
Vol 11 (1) ◽  
Author(s):  
Li Yang ◽  
Caiyi Jiang ◽  
Shenghui Guo ◽  
Libo Zhang ◽  
Jiyun Gao ◽  
...  
Keyword(s):  
Microwave Plasma ◽  
Diamond Films ◽  
Argon Atmosphere ◽  
Plasma Cvd ◽  
Cvd Method ◽  
Synthesis Strategy ◽  
Microwave Plasma Cvd

Deposition of large area uniform diamond films by microwave plasma CVD

Vacuum ◽  
2018 ◽  
Vol 147 ◽  
pp. 134-142 ◽  
Author(s):  
J. Weng ◽  
F. Liu ◽  
L.W. Xiong ◽  
J.H. Wang ◽  
Q. Sun
Keyword(s):  
Microwave Plasma ◽  
Diamond Films ◽  
Plasma Cvd ◽  
Large Area ◽  
Microwave Plasma Cvd

High-speed synthesis of heavily boron-doped diamond films by in-liquid microwave plasma CVD

2019 ◽  
Vol 92 ◽  
pp. 41-46 ◽  
Author(s):  
Yohei Harada ◽  
Ryota Hishinuma ◽  
Nicolae Spătaru ◽  
Yusei Sakurai ◽  
Kazuya Miyasaka ◽  
...  
Keyword(s):  
High Speed ◽  
Microwave Plasma ◽  
Diamond Films ◽  
Plasma Cvd ◽  
Boron Doped Diamond ◽  
Boron Doped ◽  
Microwave Plasma Cvd

Thermal Conductivity of Diamond Films Synthesized by Microwave Plasma CVD

1986 ◽  
Vol 25 (Part 2, No. 10) ◽  
pp. L808-L810 ◽  
Author(s):  
Akira Ono ◽  
Tetsuya Baba ◽  
Hiroyuki Funamoto ◽  
Akira Nishikawa
Keyword(s):  
Thermal Conductivity ◽  
Microwave Plasma ◽  
Diamond Films ◽  
Plasma Cvd ◽  
Microwave Plasma Cvd

Electrical Contacts to Polycrystalline B Doped Diamond Films

1989 ◽  
Vol 162 ◽  
Author(s):  
K. Nishimura ◽  
K. Das ◽  
M. Iwase ◽  
J. T. Glass ◽  
K. Kobashi
Keyword(s):  
Carrier Concentration ◽  
Room Temperature ◽  
Microwave Plasma ◽  
Diamond Films ◽  
Electrical Contacts ◽  
Plasma Cvd ◽  
Microwave Plasma Cvd ◽  
Order Of Magnitude

ABSTRACTB doped diamond films were synthesized by microwave plasma CVD and electrical contacts were fabricated by R F sputtering. Rc was obtained for Pt, Ni, TaSi2, and Al asdeposited contacts at room temperature. Pt gave the minimum Rc and Al gave the maximum Rc of the metals investigated on films containing a carrier concentration of 5 × 1018/cm3. The minimum Rc, 8.6 × 10−4 Ω cm 2, was obtained on heavily B doped diamond films with a carrier concentration of 2.7 × 1020/cm3. After nnealing at 400 °C, the Rc of Pt contacts on B doped diamond films with a resistivity of 2×104 Ω1 cm decreased by approximately one order of magnitude.

Linear antenna microwave plasma CVD deposition of diamond films over large areas

Vacuum ◽  
2012 ◽  
Vol 86 (6) ◽  
pp. 776-779 ◽  
Author(s):  
A. Kromka ◽  
O. Babchenko ◽  
T. Izak ◽  
K. Hruska ◽  
B. Rezek
Keyword(s):  
Microwave Plasma ◽  
Diamond Films ◽  
Linear Antenna ◽  
Plasma Cvd ◽  
Microwave Plasma Cvd
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