Effects of magnetic material, coating thickness, and tip radius on magnetic force microscope (MFM) spatial resolution have been systematically investigated. MFM tips are prepared by using an UHV sputtering system by coating magnetic materials on non-magnetic Si tips employing targets of Ni, Ni-Fe, Co, Fe, Fe-B, and Fe-Pd. MFM spatial resolutions better than 9 nm have been confirmed by employing magnetic tips coated with high magnetic moment materials with optimized thicknesses.